National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu, 610209, Sichuan, China.
The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, Sichuan, China.
Sci Rep. 2023 Jun 19;13(1):9917. doi: 10.1038/s41598-023-36584-5.
Phase extraction from single interferogram is of high significance and increasingly interest in optical metrology. In this contribute we propose an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method to extract the phase from single interferogram without carrier. At each pixel, a Lissajous figure is created by plotting N against D, where N and D are subtractions and additions of intensities of adjacent pixels in a small window. The so created Lissajous figure is already in phase quadrature because of the subtraction and addition process, and the Lissajous Figure is forced to be closed by taking the opposite values of N and D, i.e. -N and -D into account. The closed and in phase quadrature Lissajous Figure is the key point for APLEF to demodulate the single inteferogram without carrier in theoretically. The simulation shows its higher accuracy than existed SPT and Garbusi's method and the experiments finally corroborate its effectiveness.
从单个干涉图中提取相位在光学计量中具有重要意义，且日益受到关注。在本文中，我们提出了一种先进的像素级利萨如椭圆拟合（APLEF）方法，用于从无载波的单个干涉图中提取相位。在每个像素处，通过绘制 N 与 D 的关系来创建利萨如图形，其中 N 和 D 是小窗口中相邻像素强度的相减和相加。由于减法和加法过程，所创建的利萨如图形已经处于正交相位，并且通过考虑 N 和 D 的相反值（即-N 和-D），利萨如图形被强制闭合。闭合且处于正交相位的利萨如图形是 APLEF 从理论上解调无载波单个干涉图的关键。模拟结果表明，该方法比现有的 SPT 和 Garbusi 方法具有更高的精度，实验最终证实了其有效性。
