Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States.
ACS Nano. 2023 Jul 11;17(13):12225-12233. doi: 10.1021/acsnano.3c00723. Epub 2023 Jun 26.
Metal infiltration from an acid solution of a metal precursor into the poly(2-vinylpyridine) (P2VP) microdomains of a polystyrene--P2VP block copolymer is shown to reduce the uptake of solvent vapor during a subsequent solvent annealing process, locking the morphology of the self-assembled microdomains. The amount of metal, here Pt, incorporated into the P2VP increases with both metal precursor [PtCl] and hydrochloric acid concentrations, reaching 0.83 Pt atom per pyridine unit. The metal is then exfiltrated using a KOH + ethylenediaminetetraacetic acid disodium salt dihydrate (NaEDTA) complexing solution, which restores solvent uptake and unlocks the morphology. The reversibility of the metal infiltration and morphology locking is demonstrated in a multistage annealing process and is confirmed for Fe as well as Pt. Reversible locking and unlocking of block copolymer microdomain morphologies expand their utility for nanofabrication processes by allowing the morphology to be fixed during subsequent process steps.
金属前体的酸性溶液向聚苯乙烯-聚(2-乙烯基吡啶)(P2VP)嵌段共聚物的 P2VP 微区中的渗透,被证明可以减少随后的溶剂退火过程中溶剂蒸气的吸收,从而锁定自组装微区的形态。此处所加入的金属(Pt)的量随金属前体[PtCl]和盐酸浓度的增加而增加,达到每个吡啶单元 0.83 个 Pt 原子。然后使用 KOH +乙二胺四乙酸二钠二水合物(NaEDTA)络合溶液将金属萃取出来,这恢复了溶剂的吸收并解锁了形态。金属渗透和形态锁定的可逆性在多阶段退火过程中得到了证明,Fe 和 Pt 也是如此。嵌段共聚物微区形态的可逆锁定和解锁通过在后续工艺步骤中固定形态,扩展了它们在纳米制造工艺中的应用。