• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

偏振无关型3D硅基绝缘体上硅垂直光耦合器的设计与制造

Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler.

作者信息

Yu Shengtao, Li Xiaoyu, Gui Chengqun

机构信息

School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China.

The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.

出版信息

Micromachines (Basel). 2023 Jun 18;14(6):1268. doi: 10.3390/mi14061268.

DOI:10.3390/mi14061268
PMID:37374853
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10303244/
Abstract

An optical coupler is a key input/output (I/O) device in a photonic integrated circuit (PIC), which plays the role of light-source import and modulated light output. In this research, a vertical optical coupler consisting of a concave mirror and a half-cone edge taper was designed. We optimized the structure of mirror curvature and taper through finite-difference-time-domain (FDTD) and ZEMAX simulation to achieve mode matching between SMF (single-mode fiber) and the optical coupler. The device was fabricated via laser-direct-writing 3D lithography, dry etching and deposition on a 3.5 µm silicon-on-insulator (SOI) platform. The test results show that the overall loss of the coupler and its connected waveguide at 1550 nm was 1.11 dB in transverse-electric (TE) mode and 2.25 dB in transverse-magnetic (TM) mode.

摘要

光耦合器是光子集成电路（PIC）中的关键输入/输出（I/O）器件，其作用是导入光源并输出调制光。在本研究中，设计了一种由凹面镜和半圆锥边缘锥组成的垂直光耦合器。我们通过时域有限差分（FDTD）和ZEMAX模拟优化了镜面曲率和锥度的结构，以实现单模光纤（SMF）与光耦合器之间的模式匹配。该器件通过激光直写3D光刻、干法蚀刻并沉积在3.5μm绝缘体上硅（SOI）平台上制造而成。测试结果表明，在横向电场（TE）模式下，耦合器及其连接波导在1550nm处的总损耗为1.11dB，在横向磁场（TM）模式下为2.25dB。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/1d6d5ab4b416/micromachines-14-01268-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/c3f7160b1e90/micromachines-14-01268-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/2f6ad3b17d0f/micromachines-14-01268-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/69395efaad27/micromachines-14-01268-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/356fe85fd269/micromachines-14-01268-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/0501e078ef9d/micromachines-14-01268-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/a30b32500ff2/micromachines-14-01268-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/1d6d5ab4b416/micromachines-14-01268-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/c3f7160b1e90/micromachines-14-01268-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/2f6ad3b17d0f/micromachines-14-01268-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/69395efaad27/micromachines-14-01268-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/356fe85fd269/micromachines-14-01268-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/0501e078ef9d/micromachines-14-01268-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/a30b32500ff2/micromachines-14-01268-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2b1/10303244/1d6d5ab4b416/micromachines-14-01268-g007.jpg

相似文献

1
Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler.偏振无关型3D硅基绝缘体上硅垂直光耦合器的设计与制造
Micromachines (Basel). 2023 Jun 18;14(6):1268. doi: 10.3390/mi14061268.
2
Fiber-chip edge coupler with large mode size for silicon photonic wire waveguides.用于硅光子线波导的大模尺寸光纤芯片边缘耦合器。
Opt Express. 2016 Mar 7;24(5):5026-5038. doi: 10.1364/OE.24.005026.
3
Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency.设计具有高耦合效率的完全垂直、偏振无关的二维光栅耦合器。
Sensors (Basel). 2023 May 11;23(10):4662. doi: 10.3390/s23104662.
4
CMOS compatible polarization splitter using hybrid plasmonic waveguide.采用混合等离子体波导的互补金属氧化物半导体兼容偏振分束器。
Opt Express. 2012 Nov 5;20(23):25345-55. doi: 10.1364/OE.20.025345.
5
Ultra-low loss SiN edge coupler interfacing with a single-mode fiber.与单模光纤连接的超低损耗氮化硅边缘耦合器。
Opt Lett. 2022 Sep 15;47(18):4786-4789. doi: 10.1364/OL.469708.
6
Ultracompact and high efficient silicon-based polarization splitter-rotator using a partially-etched subwavelength grating coupler.采用部分蚀刻亚波长光栅耦合器的超紧凑型高效硅基偏振分束旋转器。
Sci Rep. 2016 Jun 16;6:27949. doi: 10.1038/srep27949.
7
Subwavelength waveguide grating for mode conversion and light coupling in integrated optics.用于集成光学中模式转换和光耦合的亚波长波导光栅。
Opt Express. 2006 May 29;14(11):4695-702. doi: 10.1364/oe.14.004695.
8
Vertically-integrated multimode interferometer coupler for 3D photonic circuits in SOI.用于硅基绝缘体上硅三维光子电路的垂直集成多模干涉仪耦合器。
Opt Express. 2011 Feb 14;19(4):2916-21. doi: 10.1364/OE.19.002916.
9
High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay.具有非晶硅覆盖层的氮化硅高效自聚焦超材料光栅耦合器。
Sci Rep. 2024 May 22;14(1):11651. doi: 10.1038/s41598-024-62336-0.
10
SOI-based compact mode- and polarization-division multiplexer for on-chip optical interconnects: design and simulation.
Appl Opt. 2022 May 10;61(14):4195-4203. doi: 10.1364/AO.457469.

本文引用的文献

1
Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues.硅光子学中的光栅耦合器：设计原理、新兴趋势及实际问题
Micromachines (Basel). 2020 Jul 8;11(7):666. doi: 10.3390/mi11070666.
2
Controlling propagation and coupling of waveguide modes using phase-gradient metasurfaces.使用相位梯度超表面控制波导模式的传播和耦合
Nat Nanotechnol. 2017 Jul;12(7):675-683. doi: 10.1038/nnano.2017.50. Epub 2017 Apr 17.
3
Integrated metamaterials for efficient and compact free-space-to-waveguide coupling.用于高效紧凑的自由空间到波导耦合的集成超材料。
Opt Express. 2014 Nov 3;22(22):27175-82. doi: 10.1364/OE.22.027175.