Li Yihao, Long Junyu, Chen Yun, Huang Yan, Zhao Ni
Department of Electronic Engineering, The Chinese University of Hong Kong, New Territories, Hong Kong SAR, 999077, P. R. China.
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, P. R. China.
Adv Mater. 2022 May;34(21):e2200517. doi: 10.1002/adma.202200517. Epub 2022 Apr 27.
Simultaneously achieving high spatial resolution and low crosstalk interference has been a fundamental challenge for flexible pressure sensor arrays. Here the authors present a high-resolution flexible pressure sensor array fabricated through a two-step laser manufacturing process, where individual sensing pixels and their interconnects are sequentially defined by laser-induced graphenization and ablation to minimize crosstalk interferences. The geometry of the interconnects is optimized through theoretical modeling and experimental validation. Characterization results show that the new device design induces a remarkable reduction of the crosstalk coefficient, from -8.21 to -43.63 dB, of the 0.7 mm-resolution sensor arrays, and the crosstalk suppression is particularly beneficial for application scenarios involving pressure sensing on soft surfaces (e.g., human skin and organs). Applications of the sensor array in tactile pattern recognition and minimally-invasive cancer surgery are demonstrated.
同时实现高空间分辨率和低串扰干扰一直是柔性压力传感器阵列面临的一项基本挑战。本文作者展示了一种通过两步激光制造工艺制造的高分辨率柔性压力传感器阵列，其中各个传感像素及其互连通过激光诱导石墨化和烧蚀依次定义，以尽量减少串扰干扰。互连的几何形状通过理论建模和实验验证进行了优化。表征结果表明，新的器件设计使0.7毫米分辨率传感器阵列的串扰系数从-8.21分贝显著降低至-43.63分贝，并且串扰抑制对于涉及软表面（如人体皮肤和器官）压力传感的应用场景特别有益。展示了该传感器阵列在触觉模式识别和微创癌症手术中的应用。
