Park Chanwoo, Choi Heenang, Lee Ga Yeon, Park Bo Keun, Chung Taek-Mo
Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong Daejeon 34114, Korea.
Department of Chemistry, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Korea.
ACS Omega. 2023 Jun 12;8(25):22783-22787. doi: 10.1021/acsomega.3c01697. eCollection 2023 Jun 27.
Novel barium heteroleptic complexes were synthesized through the substitution of the bis(trimethylsilyl)amide of Ba(btsa)·2DME with aminoalkoxide and β-diketonate ligands. Compounds [Ba(ddemap)(tmhd)] () and [Ba(ddemmp)(tmhd)] () were obtained and analyzed through Fourier transform infrared spectroscopy, nuclear magnetic resonance, thermogravimetric analysis, and elemental analysis (ddemapH = 1-(dimethylamino)-5-((2-(dimethylamino)ethyl) (methyl)amino)pentan-3-ol and ddemmpH = 1-(dimethylamino)-5-((2-(dimethylamino)ethyl) (methyl)amino)-3-methylpentan-3-ol). In single-crystal X-ray crystallography, complex exhibited a dimeric structure with μ-O bonds of the ddemap ligand. All complexes exhibited high volatility and could be sublimed under reduced pressure (0.5 Torr) at 160 °C, indicating that these complexes are promising candidates as atomic layer deposition or chemical vapor deposition precursors for the growth of barium-containing thin films.
通过用氨基醇盐和β-二酮配体取代Ba(btsa)·2DME的双(三甲基硅基)酰胺，合成了新型钡杂配体配合物。获得了化合物Ba(ddemap)(tmhd)和Ba(ddemmp)(tmhd)，并通过傅里叶变换红外光谱、核磁共振、热重分析和元素分析进行了表征(ddemapH = 1-(二甲基氨基)-5-((2-(二甲基氨基)乙基)(甲基)氨基)戊-3-醇，ddemmpH = 1-(二甲基氨基)-5-((2-(二甲基氨基)乙基)(甲基)氨基)-3-甲基戊-3-醇)。在单晶X射线晶体学中，配合物呈现出具有ddemap配体的μ-O键的二聚体结构。所有配合物都表现出高挥发性，并且可以在160℃的减压(0.5托)下升华，这表明这些配合物有望作为用于生长含钡薄膜的原子层沉积或化学气相沉积前驱体。
