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用于全色氮化镓微发光二极管的氮化镓微盘上三元铟镓氮量子阱的优化

Optimization of Ternary InGaN Quantum Wells on GaN Microdisks for Full-Color GaN Micro-LEDs.

作者信息

Lin Yu-Chung, Lo Ikai, Tsai Cheng-Da, Wang Ying-Chieh, Huang Hui-Chun, Li Chu-An, Chou Mitch M C, Chang Ting-Chang

机构信息

Department of Physics, National Sun Yat-sen University, Kaohsiung 80424, Taiwan.

Center for Nanoscience and Nanotechnology, National Sun Yat-sen University, Kaohsiung 80424, Taiwan.

出版信息

Nanomaterials (Basel). 2023 Jun 23;13(13):1922. doi: 10.3390/nano13131922.

DOI:10.3390/nano13131922
PMID:37446439
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10343837/
Abstract

Red, green, and blue light InGaN multiple quantum wells have been grown on GaN/γ-LiAlO microdisk substrates by plasma-assisted molecular beam epitaxy. We established a mechanism to optimize the self-assembly growth with ball-stick model for InGaN multiple quantum well microdisks by bottom-up nanotechnology. We showed that three different red, green, and blue lighting micro-LEDs can be made of one single material (InGaN) solely by tuning the indium content. We also demonstrated that one can fabricate a beautiful InGaN-QW microdisk by choosing an appropriate buffer layer for optoelectronic applications.

摘要

通过等离子体辅助分子束外延在GaN/γ-LiAlO微盘衬底上生长了红、绿、蓝光InGaN多量子阱。我们建立了一种机制,通过自下而上的纳米技术,用球棒模型优化InGaN多量子阱微盘的自组装生长。我们表明,仅通过调整铟含量,就可以用单一材料(InGaN)制造出三种不同的红、绿、蓝光微型发光二极管。我们还证明,通过选择合适的缓冲层,可以制造出用于光电子应用的漂亮的InGaN-QW微盘。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/f192991900cb/nanomaterials-13-01922-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/ba53a5620d0e/nanomaterials-13-01922-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/8068100dac49/nanomaterials-13-01922-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/c2e7026f7ad5/nanomaterials-13-01922-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/be27ef0a26c0/nanomaterials-13-01922-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/6f0b27b074dc/nanomaterials-13-01922-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/f192991900cb/nanomaterials-13-01922-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/ba53a5620d0e/nanomaterials-13-01922-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/8068100dac49/nanomaterials-13-01922-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/c2e7026f7ad5/nanomaterials-13-01922-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/be27ef0a26c0/nanomaterials-13-01922-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/6f0b27b074dc/nanomaterials-13-01922-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/773c/10343837/f192991900cb/nanomaterials-13-01922-g006.jpg

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Damage-Free Smooth-Sidewall InGaAs Nanopillar Array by Metal-Assisted Chemical Etching.无损伤光滑侧壁 InGaAs 纳米柱阵列的金属辅助化学腐蚀法制备。
ACS Nano. 2017 Oct 24;11(10):10193-10205. doi: 10.1021/acsnano.7b04752. Epub 2017 Sep 29.
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Nitride semiconductors free of electrostatic fields for efficient white light-emitting diodes.用于高效白光发光二极管的无静电场氮化物半导体。
Nature. 2000 Aug 24;406(6798):865-8. doi: 10.1038/35022529.