Sakaki Atsushi, Funato Mitsuru, Miyano Munehiko, Okazaki Toshiyuki, Kawakami Yoichi
Nichia Corporation, Anan, Tokushima, 774-8601, Japan.
Department of Electronic Science and Engineering, Kyoto University, Kyoto, 615-8510, Japan.
Sci Rep. 2019 Mar 6;9(1):3733. doi: 10.1038/s41598-019-39086-5.
Among the III-nitride semiconductors, InGaN is a key material for visible optical devices such as light-emitting diodes (LEDs), laser diodes, and solar cells. Light emission is achieved via electron-hole recombination within the InGaN layer. When InGaN-based blue LEDs were first commercialized, the high probability of electron-hole radiative recombination despite the presence of numerous threading dislocations was a mystery. Extensive studies have proposed that carrier localization in nanoscopic potential fluctuations due, for example, to the immiscibility between InN and GaN or random alloy fluctuations is a key mechanism for the high emission efficiency. In actual LED devices, not only nanoscopic potential fluctuations but also microscopic ones exist within the InGaN quantum well light-emitting layers. Herein we map the synchrotron radiation microbeam X-ray fluorescence of InGaN blue LEDs at a sub-micron level. To acquire weak signals of In, Ar, which is in the air and has a fluorescent X-ray energy similar to that of In, is evacuated from the sample chamber by He purge. As a result, we successfully visualize the spatial In distribution of InGaN layer nondestructively and present good agreement with optical properties. Additionally, we demonstrate that unlike nanoscopic fluctuations, microscopic In compositional fluctuations do not necessarily have positive effects on device performance. Appropriately controlling both nanoscopic and microscopic fluctuations at the same time is necessary to achieve supreme device performance.
在III族氮化物半导体中,氮化铟镓是用于发光二极管(LED)、激光二极管和太阳能电池等可见光光学器件的关键材料。发光是通过氮化铟镓层内的电子-空穴复合实现的。当基于氮化铟镓的蓝色LED首次商业化时,尽管存在大量位错,但电子-空穴辐射复合的高概率仍是一个谜。广泛的研究表明,例如由于氮化铟和氮化镓之间的不混溶性或随机合金波动导致的纳米级势阱中的载流子局域化是高发射效率的关键机制。在实际的LED器件中,氮化铟镓量子阱发光层内不仅存在纳米级势阱,还存在微观势阱。在此,我们在亚微米水平上绘制了氮化铟镓蓝色LED的同步辐射微束X射线荧光图谱。为了获取铟的微弱信号,通过氦气吹扫将空气中具有与铟相似的荧光X射线能量的氩气从样品室中抽出。结果,我们成功地无损可视化了氮化铟镓层的铟空间分布,并与光学性质呈现出良好的一致性。此外,我们证明,与纳米级波动不同,微观铟成分波动不一定对器件性能有积极影响。要实现卓越的器件性能,同时适当地控制纳米级和微观波动是必要的。