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具有低于60 mV/十倍频程亚阈值摆幅的铁电栅极全二维场效应晶体管。

Ferroelectric-Gated All 2D Field-Effect Transistors with Sub-60 mV/dec Subthreshold Swing.

作者信息

Liu Zhongyang, Sun Yilin, Ding Yingtao, Li Mingjie, Liu Xiao, Liu Zhifang, Chen Zhiming

机构信息

School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

BIT Chongqing Institute of Microelectronics & Microsystems, Chongqing 401332, China.

出版信息

J Phys Chem Lett. 2023 Aug 3;14(30):6784-6791. doi: 10.1021/acs.jpclett.3c01463. Epub 2023 Jul 21.

Abstract

With the continuous scaling down of the modern integrated circuits, conventional metal-oxide-semiconductor field effect transistors are becoming inefficient due to various nonideal effects such as enhanced short-channel effects. Recently, emerging two-dimensional (2D) ferroelectrics have demonstrated their ability to maintain ferroelectricity at the nanoscale and have shown superior properties compared to three-dimensional ferroelectrics. Here, we report a ferroelectric field effect transistor composed of all 2D van der Waals (vdWs) heterostructures and provide a comprehensive study of the modulation of ferroelectric polarization on the carrier transport properties. Remarkably, the ferroelectric polarization allowed for achieving an ultralow subthreshold swing of just 26 mV/dec and a high carrier mobility of up to 72.3 cm/(V s) at a smaller drain voltage of 10 mV. These impressive characteristics offer new insights into evaluating the regulatory effect of ferroelectric polarization on the electrical properties of all 2D vdWs heterostructures.

摘要

随着现代集成电路不断缩小尺寸,由于诸如短沟道效应增强等各种非理想效应,传统金属氧化物半导体场效应晶体管正变得效率低下。最近,新兴的二维(2D)铁电体已证明其在纳米尺度上保持铁电性的能力,并且与三维铁电体相比表现出优异的性能。在此,我们报道了一种由全二维范德华(vdWs)异质结构组成的铁电场效应晶体管,并对铁电极化对载流子输运性质的调制进行了全面研究。值得注意的是,铁电极化使得在10 mV的较小漏极电压下实现了仅26 mV/dec的超低亚阈值摆幅和高达72.3 cm/(V s)的高载流子迁移率。这些令人印象深刻的特性为评估铁电极化对所有二维vdWs异质结构电学性质的调节作用提供了新的见解。

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