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亚阈值摆幅超低且接近理论极限的双结场效应晶体管。

Dual-Junction Field-Effect Transistor with Ultralow Subthreshold Swing Approaching the Theoretical Limit.

作者信息

Chen Xinhao, Li Shasha, Zhu Lingyu, Li Jingbo, Sun Yiming, Huo Nengjie

机构信息

School of Semiconductor Science and Technology, South China Normal University, Foshan ,Guangdong 528225, P. R. China.

School of Electronic Engineering, Chaohu University, Hefei, Anhui 238000, P. R. China.

出版信息

ACS Appl Mater Interfaces. 2024 Apr 29. doi: 10.1021/acsami.3c17572.

DOI:10.1021/acsami.3c17572
PMID:38684053
Abstract

Metal-oxide-semiconductor field-effect transistors as basic electronic devices of integrated circuits have been greatly developed and widely used in the past decades. However, as the thickness of the conducting channel decreases, the interface electronic scattering between the gate oxide layer and the channel significantly impacts the performance of the transistor. To address this issue, van der Waals heterojunction field-effect transistors (vdWJFETs) have been proposed using two-dimensional semiconductors, which utilize the built-in electric field at the sharp van der Waals interface to regulate the channel conductance without the need of a complex gate oxide layer. In this study, a novel dual-junction vdWJFET composed of a MoS channel and a Te nanosheet gate has been developed. This device achieves an ultralow subthreshold swing (SS) and an extremely low current hysteresis, greatly surpassing the single-junction vdWJFET. In the transistor, the SS decreases from 475.04 to 68.3 mV dec, nearly approaching the theoretical limit of 60 mV dec at room temperature. The pinch-off voltage () decreases from -4.5 to -0.75 V, with a current hysteresis of ∼10 mV and a considerable field-effect mobility (μ) of 36.43 cm V s. The novel dual-junction vdWJFET provides a new approach to realize a transistor with a theoretical ideal SS and a negligible current hysteresis toward low-power electronic applications.

摘要

金属氧化物半导体场效应晶体管作为集成电路的基本电子器件,在过去几十年中得到了极大的发展并被广泛应用。然而,随着导电沟道厚度的减小,栅氧化层与沟道之间的界面电子散射对晶体管的性能产生了显著影响。为了解决这个问题,人们提出了使用二维半导体的范德华异质结场效应晶体管(vdWJFET),它利用尖锐的范德华界面处的内建电场来调节沟道电导,而无需复杂的栅氧化层。在本研究中,开发了一种由MoS沟道和Te纳米片栅极组成的新型双结vdWJFET。该器件实现了超低的亚阈值摆幅(SS)和极低的电流滞后,大大超过了单结vdWJFET。在该晶体管中,SS从475.04降至68.3 mV/dec,在室温下几乎接近60 mV/dec的理论极限。夹断电压()从-4.5降至-0.75 V,电流滞后约为10 mV,场效应迁移率(μ)相当可观,为36.43 cm²/V·s。这种新型双结vdWJFET为实现具有理论理想SS且电流滞后可忽略不计的晶体管以用于低功耗电子应用提供了一种新方法。

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