Enhancing the Plasma-Resistance Properties of LiO-AlO-SiO Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation.

To develop plasma-resistant glass materials suitable for semiconductor etching processes, we introduced alkaline earth oxides (ROs) into a LiO-AlO-SiO (LAS) glass. Analysis of glass properties with respect to the additives revealed that among the analyzed materials, the LAS material in which LiO was partially replaced by MgO (MLAS) exhibited the most favorable characteristics, including a low dielectric constant (6.3) and thermal expansion coefficient (2.302 × 10/°C). The high performance of MLAS is attributed to the high ionic field strength of Mg ions, which restricts the movement of Li ions under the influence of electric fields and thermal vibrations at elevated temperatures. When exposed to CF/O/Ar plasma, the etching speed of RO-doped glasses decreased compared with that of quartz and LAS glass, primarily owing to the generation of a high-sublimation-point fluoride layer on the surface. Herein, MLAS demonstrated the slowest etching speed, indicating exceptional plasma resistance. X-ray photoelectron spectroscopy analysis conducted immediately after plasma etching revealed that the oxidation-to-fluorination ratio of Li was the lowest for MLAS. This observation suggests that the presence of Mg ions in the plasma discharge inhibits the migration of Li ions toward the surface, thereby contributing to the excellent plasma resistance of MLAS.