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采用重复频率锁定孤子微梳的微米级精度绝对距离测量

Micrometer-precision absolute distance measurement with a repetition-rate-locked soliton microcomb.

作者信息

Yang Mingyue, Wang Guochao, Wang Zhichuang, Li Xianbin, Zhu Lingxiao, Wang Weiqiang, Zhang Wenfu, Yan Shuhua, Yang Jun

出版信息

Opt Lett. 2023 Aug 15;48(16):4356-4359. doi: 10.1364/OL.499291.

Abstract

The soliton microcomb has sparked interest in high-precision distance measurement, owing to its ultrahigh repetition rate and chip-integrated scale. We report absolute distance measurements based on synthetic wavelength interferometry with a soliton microcomb. We stabilized the repetition rate of 48.98 GHz through injection locking, with fluctuations below 0.25 Hz. Distance measurements up to 64 mm were demonstrated, presenting residuals below 2.7 m compared with a referenced laser interferometer. Long-term distance measurements were made at two fixed positions of approximately 0.2 m and 1.4 m, resulting in a minimum Allan deviation as low as 56.2 nm at an average time of 0.05 s. The dynamic demonstration illustrated that the proposed system could track round-trip motion of 3 mm at speeds up to 100 mm/s. The proposed distance measurement system is, to our knowledge, the first microcomb-based synthetic wavelength interferometer and achieves a ranging precision of tens of nanometers, with potential applications in the fields of satellite formation flying, high-end manufacturing, and micro-nano processing.

摘要

孤子微梳因其超高重复率和芯片集成规模,引发了人们对高精度距离测量的兴趣。我们报告了基于孤子微梳的合成波长干涉测量法的绝对距离测量。我们通过注入锁定将重复率稳定在48.98吉赫兹,波动低于0.25赫兹。展示了高达64毫米的距离测量,与参考激光干涉仪相比,残余误差低于2.7米。在大约0.2米和1.4米的两个固定位置进行了长期距离测量,在平均时间为0.05秒时,最小阿伦偏差低至56.2纳米。动态演示表明,所提出的系统能够以高达100毫米/秒的速度跟踪3毫米的往返运动。据我们所知,所提出的距离测量系统是首个基于微梳的合成波长干涉仪,实现了数十纳米的测距精度,在卫星编队飞行、高端制造和微纳加工领域具有潜在应用。

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