用于增强硅基薄膜压电MEMS谐振器Q值的Reem-Shape声子晶体

Awad Mohammed, Workie Temesgen Bailie, Bao Jing-Fu, Hashimoto Ken-Ya

School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Micromachines (Basel). 2023 Jul 31;14(8):1540. doi: 10.3390/mi14081540.

This paper proposes a reem-shaped phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate upon its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape phononic crystals generate a band gap up to 175 MHz with a BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and the unloaded quality factor from 133,000 to 160,000, representing 33.3-fold and 1.2-fold improvements, respectively.

本文提出了一种用于增强TPoS谐振器性能的回形声子晶体。所提出的声子晶体提供了一个超宽的声子带隙，当它放置在锚定边界时，可防止能量通过支撑衬底泄漏，从而使谐振器的品质因数得到显著提高。模拟结果表明，回形声子晶体产生的带隙高达175 MHz，带隙宽度为90%，并将锚定品质因数从180,000提高到6,000,000，将无载品质因数从133,000提高到160,000，分别提高了33.3倍和1.2倍。