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用于提高硅基薄膜压电微机电系统谐振器品质因数的非常规束缚结构

Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator.

作者信息

Awad Mohammed, Workie Temesgen Bailie, Bao Jingfu, Hashimoto Ken-Ya

机构信息

School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

出版信息

Micromachines (Basel). 2023 Oct 22;14(10):1965. doi: 10.3390/mi14101965.

DOI:10.3390/mi14101965
PMID:37893402
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10608936/
Abstract

This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.

摘要

本文通过力分布概念提出了一种支撑系绳的新设计。施加在系绳上的传递力将分布在新的系绳设计区域,从而降低传递到锚固边界的声能并提高储能。与传统系绳设计获得的58000相比,该技术实现的锚固品质因数为175000,提高了两倍。此外,所提出设计的空载品质因数从23750提高到27442,提高了1.2倍。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/564d00bf60d4/micromachines-14-01965-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/bd9f73a9bca6/micromachines-14-01965-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/eee5b0124843/micromachines-14-01965-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/726e53a51fec/micromachines-14-01965-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/9b96dbb5e23c/micromachines-14-01965-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/c0e00d0135a2/micromachines-14-01965-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/312d971ef645/micromachines-14-01965-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/9343b4e5a935/micromachines-14-01965-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/c3505c159a59/micromachines-14-01965-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/e650a58f6726/micromachines-14-01965-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/564d00bf60d4/micromachines-14-01965-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/bd9f73a9bca6/micromachines-14-01965-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/eee5b0124843/micromachines-14-01965-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/726e53a51fec/micromachines-14-01965-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/9b96dbb5e23c/micromachines-14-01965-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/c0e00d0135a2/micromachines-14-01965-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/312d971ef645/micromachines-14-01965-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/9343b4e5a935/micromachines-14-01965-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/c3505c159a59/micromachines-14-01965-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/e650a58f6726/micromachines-14-01965-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dd2c/10608936/564d00bf60d4/micromachines-14-01965-g010.jpg

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本文引用的文献

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Micromachines (Basel). 2022 Jul 29;13(8):1217. doi: 10.3390/mi13081217.
3
Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame.
通过节能附加框架提高横向振动射频微机电系统谐振器的品质因数
Micromachines (Basel). 2022 Jan 9;13(1):105. doi: 10.3390/mi13010105.
4
Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal.基于柱体的声子晶体对兰姆波谐振器的锚定损耗降低
Micromachines (Basel). 2021 Jan 7;12(1):62. doi: 10.3390/mi12010062.
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Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review.压电微机电系统横向振动谐振器中的耗散分析方法与品质因数增强策略综述
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Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers.利用声子晶体系链逼近微机械体声波谐振器的本征品质因数极限。
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