Dai Tianxiang, Phan Thaibao, Wang Evan W, Kwon Soonyang, Son Jaehyeon, Lee Myungjun, Fan Jonathan A
Department of Electrical Engineering, Stanford University, Stanford, CA 94305 USA.
Equipment R&D Team 4, Mechatronics Research, Samsung Electronics Co., Ltd, Gyeonggi-do, 18848 Republic of Korea.
Microsyst Nanoeng. 2023 Oct 7;9:125. doi: 10.1038/s41378-023-00588-y. eCollection 2023.
We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture. The division-of-focal-plane concept combines a multiplexed illumination scheme based on Fourier optics together with an integrated telescopic light-field imaging system. Polarization-resolved imaging is achieved using broadband nanostructured plasmonic polarizers as functional pinhole apertures. The recording of polarization and wavelength information on the image sensor is highly interpretable. We also develop a calibration approach based on a customized neural network architecture that can produce calibrated measurements in real-time. As a proof-of-concept demonstration, we use our calibrated system to accurately reconstruct a thin film thickness map from a four-inch wafer. We anticipate that our concept will have utility in metrology, machine vision, computational imaging, and optical computing platforms.
我们介绍了一种成像系统，该系统能够在单次图像采集过程中，同时记录一组波长通道的完整穆勒偏振响应。焦平面分割概念将基于傅里叶光学的多路复用照明方案与集成的望远式光场成像系统相结合。利用宽带纳米结构等离子体偏振器作为功能性针孔孔径实现偏振分辨成像。图像传感器上偏振和波长信息的记录具有高度的可解释性。我们还开发了一种基于定制神经网络架构的校准方法，该方法能够实时生成校准测量结果。作为概念验证演示，我们使用校准后的系统从一个四英寸晶圆精确重建薄膜厚度图。我们预计我们的概念将在计量学、机器视觉、计算成像和光学计算平台中发挥作用。
