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氟烷基化重氮萘醌及其与含氟共聚物的共混物在紫外线照射下的溶解行为

Dissolution Behavior of Fluoroalkylated Diazonaphthoquinone and Its Blends with Fluorinated Copolymers under UV Irradiation.

作者信息

Kim Gayoung, Kang Sae-Eun, Kim Doo Hong, Won Jong-In, Ku Yejin, Son Jongchan, Lee Jin-Kyun, Jung Byung Jun

机构信息

Program in Environment and Polymer Engineering, Inha University, Incheon 22212, Republic of Korea.

Department of Polymer Science and Engineering, Inha University, Incheon 22212, Republic of Korea.

出版信息

Molecules. 2023 Sep 24;28(19):6784. doi: 10.3390/molecules28196784.

Abstract

This article reports on the synthesis of materials containing both a fluoroalkyl group and a diazonaphthoquinone (DNQ) moiety as well as the fabrication of negative- and positive-tone stencil patterns. Additionally, the photoreaction mechanism that contributes to the pattern formation process is discussed, and the application of these materials is explored in the pixel-formation process in organic light-emitting diode (OLED) displays. Fluoroalkylated diazonaphthoquinone () was synthesized using chemically binding a DNQ unit, which can be converted into carboxylic acid derivatives having stronger polarity, with two fluorinated alkyl chains. The purified compound is found to be soluble in a nonpolar fluorous solvent and can be uniformly coated as a thin film. When the thin film of is exposed to 365 nm UV light, its solubility in a fluorous solvent decreases due to the Wolff rearrangement and subsequent hydrolysis of a ketene moiety. In contrast, when a mixture of and a hydrophobic, fluorinated copolymer is tested for the patterning process, the copolymer delays the conversion of the ketene intermediate to carboxylic acid, resulting in the dissolution of the exposed areas in the fluorous solvent. Finally, the applicability of these materials in micropatterning is demonstrated by adopting them in the photolithography process to create pixels of OLEDs.

摘要

本文报道了含氟烷基和重氮萘醌(DNQ)部分的材料的合成以及负性和正性模版图案的制作。此外,还讨论了有助于图案形成过程的光反应机理,并探讨了这些材料在有机发光二极管(OLED)显示器像素形成过程中的应用。通过将可转化为极性更强的羧酸衍生物的DNQ单元与两条氟化烷基链进行化学键合,合成了氟烷基化重氮萘醌()。发现纯化后的化合物可溶于非极性氟溶剂,并可均匀地涂覆成薄膜。当的薄膜暴露于365nm紫外光时,由于乙烯酮部分的沃尔夫重排和随后的水解,其在氟溶剂中的溶解度降低。相反,当测试和疏水性氟化共聚物的混合物用于图案化过程时,共聚物会延迟乙烯酮中间体向羧酸的转化,导致暴露区域在氟溶剂中溶解。最后,通过在光刻工艺中采用这些材料来制造OLED像素,证明了它们在微图案化中的适用性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3bbd/10574127/ab00132f8902/molecules-28-06784-sch001.jpg

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