Xia Yushu, Sun Chenchen, Liu Wencai, Wang Xue, Wen Ke, Feng Zhiping, Zhang Gaoqiang, Fan Endong, He Qiang, Lin Zhiwei, Gou Yunfeng, Wu Yufen, Yang Jin
Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing, 400044, China.
CNPC Research Institute of Safety & Environment Technology, Beijing, 100007, China.
Small. 2024 Mar;20(10):e2305678. doi: 10.1002/smll.202305678. Epub 2023 Oct 24.
Small-scale and flexible acoustic probes are more desirable for exquisite objects like human bodies and complex-shaped components than conventional rigid ones. Herein, a thin-film flexible acoustic sensor (FA-TES) that can detect ultra-broadband acoustic signals in multiple applications is proposed. The device consists of two thin copper-coated polyvinyl chloride films, which are stimulated by acoustic waves and contact each other to generate the triboelectric signal. Interlocking nanocolumn arrays fabricated on the friction surfaces are regarded as a highly adaptive spacer enabling this device to respond to ultra-broadband acoustic signals (100 Hz-4 MHz) and enhance sensor sensitivity for film weak vibration. Benefiting from the characteristics of high shape adaptability and ultrawide response range, the FA-TES can precisely sense human physiological sounds and voice (≤10 kHz) for laryngeal health monitoring and interaction in real-time. Moreover, the FA-TES flexibly arranged on a 3D-printed vertebra model can effectively and accurately diagnose the inner defect by ultrasonic testing (≥1 MHz). It envisions that this work can provide new ideas for flexible acoustic sensor designs and optimize real-time acoustic detections of human bodies and complex components.
对于人体和形状复杂的部件等精密物体而言，小型且灵活的声学探头比传统的刚性探头更具优势。在此，我们提出了一种薄膜柔性声学传感器（FA-TES），它能够在多种应用中检测超宽带声学信号。该器件由两个镀铜的聚氯乙烯薄膜组成，它们受到声波刺激并相互接触以产生摩擦电信号。在摩擦表面上制造的互锁纳米柱阵列被视为一种高度自适应的间隔物，使该器件能够响应超宽带声学信号（100Hz - 4MHz），并增强对薄膜微弱振动的传感器灵敏度。得益于高形状适应性和超宽响应范围的特性，FA-TES能够精确地实时感知人体生理声音和语音（≤10kHz），用于喉部健康监测和交互。此外，灵活布置在3D打印椎骨模型上的FA-TES能够通过超声检测（≥1MHz）有效且准确地诊断内部缺陷。预计这项工作能够为柔性声学传感器设计提供新思路，并优化对人体和复杂部件的实时声学检测。
