Zhang Chunyan, Zhang Xiaotian, Zhang Qiang, Sang Shengbo, Ji Jianlong, Hao Runfang, Liu Yan
Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Electronic Information and Optical Engineering, Taiyuan University of Technology, Taiyuan 030024, China.
School of Software, Taiyuan University of Technology, Taiyuan 030024, China.
Micromachines (Basel). 2023 Sep 27;14(10):1848. doi: 10.3390/mi14101848.
There is a growing demand for flexible pressure sensors in environmental monitoring and human-robot interaction robotics. A flexible and susceptible sensor can discriminate multidirectional pressure, thus effectively detecting signals of small environmental changes and providing solutions for personalized medicine. This paper proposes a multidimensional force detection sensor inspired by a wind chime structure with a three-dimensional force structure to detect and analyze normal and shear forces in real time. The force-sensing structure of the sensor consists of an upper and lower membrane on a polydimethylsiloxane substrate and four surrounding cylinders. A piezoelectric hemisphere is made of BTO/PVDF/PDMS composite material. The sensor columns in the wind chime structure surround the piezoelectric layer in the middle. When pressure is applied externally, the sensor columns are connected to the piezoelectric layer with a light touch. The piezoelectric hemisphere generates a voltage signal. Due to the particular structure of the sensor, it can accurately capture multidimensional forces and identify the direction of the external force by analyzing the position of the sensor and the output voltage amplitude. The development of such sensors shows excellent potential for self-powered wearable sensors, human-computer interaction, electronic skin, and soft robotics applications.
在环境监测和人机交互机器人领域，对柔性压力传感器的需求日益增长。一种柔性且灵敏的传感器能够区分多方向压力，从而有效检测微小环境变化信号，并为个性化医疗提供解决方案。本文提出一种受风铃结构启发的多维力检测传感器，其具有三维力结构，可实时检测和分析法向力与剪切力。该传感器的力敏结构由聚二甲基硅氧烷基底上的上下薄膜以及四个周围的圆柱组成。压电半球由BTO/PVDF/PDMS复合材料制成。风铃结构中的传感器柱围绕着中间的压电层。当外部施加压力时，传感器柱会轻轻接触压电层。压电半球会产生电压信号。由于传感器的特殊结构，它能够准确捕获多维力，并通过分析传感器的位置和输出电压幅度来识别外力方向。此类传感器的发展在自供电可穿戴传感器、人机交互、电子皮肤和软机器人应用方面展现出优异的潜力。
