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表面声波器件的反射与传输分析

Reflection and Transmission Analysis of Surface Acoustic Wave Devices.

作者信息

Yu Tai-Ho

机构信息

Department of Electronic Engineering, National United University, 2 Lien Da, Nan-Shih Li, Miaoli 36063, Taiwan.

出版信息

Micromachines (Basel). 2023 Oct 1;14(10):1898. doi: 10.3390/mi14101898.

Abstract

This paper presents a study of the propagation of surface acoustic waves in a single and periodic array of metal strip overlays on the surface of layered substrates. Responses of reflected and transmitted surface acoustic waves due to various geometric design parameters of the grating arrays are investigated. An eight-dimensional matrix formulation based on Stroh formalism is adopted to analyze wave propagation in piezoelectric layered media. The dispersion curves for aluminum-zinc oxide films on glass substrates are determined using the surface impedance tensor method. A transfer matrix in terms of the state vectors in cooperation with continuity conditions on the edges of the grating array is used to determine the reflectivity and transmittance of the horizontally propagating surface acoustic waves. The analysis and simulation results show that when the surface acoustic wave is obliquely incident on an array of gratings and the strip width is equal to the gap between strips, the constructive interference of the reflected wave occurs at odd multiples of the strip width to a wavelength ratio of 0.25. When the strip width is unequal to the gap, the constructive interference of the reflected wave is an odd multiple of the strip width to a wavelength ratio of 0.5. An increase in the number of strips concentrates the reflectivity's extreme frequencies, and an increase in the strip height increases the bandwidth of the extreme frequencies. Both of these increases strengthen the reflected wave's constructive interferences.

摘要

本文介绍了在层状基底表面上单个和周期性排列的金属条覆盖层中表面声波传播的研究。研究了由于光栅阵列的各种几何设计参数而导致的反射和透射表面声波的响应。采用基于斯特罗形式的八维矩阵公式来分析压电层状介质中的波传播。使用表面阻抗张量法确定玻璃基底上铝 - 氧化锌薄膜的色散曲线。利用与光栅阵列边缘处的连续性条件相结合的状态向量的传递矩阵来确定水平传播的表面声波的反射率和透射率。分析和模拟结果表明,当表面声波斜入射到光栅阵列上且条带宽度等于条带之间的间隙时,反射波的相长干涉发生在条带宽度与波长之比为0.25的奇数倍处。当条带宽度与间隙不相等时,反射波的相长干涉是条带宽度与波长之比为0.5的奇数倍。条带数量的增加使反射率的极值频率集中,条带高度的增加增加了极值频率的带宽。这两种增加都增强了反射波的相长干涉。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c03b/10609018/5a2147933bb2/micromachines-14-01898-g001.jpg

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