Mitulinsky Alexander, Gaydaychuk Alexander, Zenkin Sergei, Meisner Stanislav, Bulakh Vlada, Linnik Stepan
National Research Tomsk Polytechnic University, 634050 Tomsk, Russia.
Institute of Strength Physics and Materials Science SB RAS, 634055 Tomsk, Russia.
Materials (Basel). 2023 Oct 19;16(20):6755. doi: 10.3390/ma16206755.
In this work, we present experimental data on carbon nanotubes integration during diamond synthesis. Carbon nanotubes layers were preliminarily deposited on silicon and diamond substrates, after which the substrates were loaded into the HFCVD reactor for further growth of the diamond phase. The CVD process was held in an argon-free H/CH working gas mixture without the use of a catalyst for carbon nanotubes growth. It is shown that in a wide range of studied working gas composition (CH concentration up to 28.6 vol.%) nanotubes etched from the substrate surface before the diamond growth process began.
在这项工作中，我们展示了金刚石合成过程中碳纳米管集成的实验数据。碳纳米管层预先沉积在硅和金刚石衬底上，之后将衬底装入热丝化学气相沉积（HFCVD）反应器中以进一步生长金刚石相。化学气相沉积（CVD）过程在不含氩气的H/CH工作气体混合物中进行，且不使用用于碳纳米管生长的催化剂。结果表明，在广泛研究的工作气体组成范围内（CH浓度高达28.6体积%），在金刚石生长过程开始之前，纳米管从衬底表面被蚀刻掉。
