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基于二维碲化钼的高性能互补电路。

High-Performance Complementary Circuits from Two-Dimensional MoTe.

作者信息

Cai Jun, Sun Zheng, Wu Peng, Tripathi Rahul, Lan Hao-Yu, Kong Jing, Chen Zhihong, Appenzeller Joerg

机构信息

Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States.

Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States.

出版信息

Nano Lett. 2023 Dec 13;23(23):10939-10945. doi: 10.1021/acs.nanolett.3c03184. Epub 2023 Nov 17.

Abstract

Two-dimensional (2D) materials hold great promise for future complementary metal-oxide semiconductor (CMOS) technology. However, the lack of effective methods to tune the Schottky barrier poses a challenge in constructing high-performance complementary circuits from the same material. Here, we reveal that the polarity of pristine MoTe field-effect transistors (FETs) with minimized air exposure is n-type, irrespective of the metal contact type. The fabricated n-FETs with palladium contact can reach electron currents up to 275 μA/μm at = 2 V. For p-FETs, we introduce a novel nitric oxide doping strategy, allowing a controlled transition of MoTe FETs from n-type to unipolar p-type. By doping only in the contact region, we demonstrate hole currents up to 170 μA/μm at = -2 V with preserved / ratios of 10. Finally, we present a complementary inverter circuit comprising the high-performance n- and p-type FETs based on MoTe, promoting the application of 2D materials in future electronic systems.

摘要

二维(2D)材料在未来互补金属氧化物半导体(CMOS)技术中具有巨大潜力。然而,缺乏有效的方法来调节肖特基势垒给用同一材料构建高性能互补电路带来了挑战。在此,我们揭示了空气暴露最小化的原始MoTe场效应晶体管(FET)的极性为n型,与金属接触类型无关。制作的具有钯接触的n-FET在V = 2 V时可达到高达275 μA/μm的电子电流。对于p-FET,我们引入了一种新颖的一氧化氮掺杂策略,可使MoTe FET从n型可控转变为单极p型。通过仅在接触区域进行掺杂,我们展示了在V = -2 V时高达170 μA/μm的空穴电流,且Ion/Ioff比率保持为10。最后,我们展示了一个基于MoTe的由高性能n型和p型FET组成的互补反相器电路,推动了二维材料在未来电子系统中的应用。

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