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通过电热掺杂实现 MoTe 晶体管的可逆且精确可控的 p/n 型掺杂。

Reversible and Precisely Controllable p/n-Type Doping of MoTe Transistors through Electrothermal Doping.

机构信息

Department of Physics, National Chung Hsing University, Taichung, 40227, Taiwan.

Department of Electrical Engineering and Institute of Electronic Engineering, National Tsing Hua University, Hsinchu, 30071, Taiwan.

出版信息

Adv Mater. 2018 Mar;30(13):e1706995. doi: 10.1002/adma.201706995. Epub 2018 Feb 12.

Abstract

Precisely controllable and reversible p/n-type electronic doping of molybdenum ditelluride (MoTe ) transistors is achieved by electrothermal doping (E-doping) processes. E-doping includes electrothermal annealing induced by an electric field in a vacuum chamber, which results in electron (n-type) doping and exposure to air, which induces hole (p-type) doping. The doping arises from the interaction between oxygen molecules or water vapor and defects of tellurium at the MoTe surface, and allows the accurate manipulation of p/n-type electrical doping of MoTe transistors. Because no dopant or special gas is used in the E-doping processes of MoTe , E-doping is a simple and efficient method. Moreover, through exact manipulation of p/n-type doping of MoTe transistors, quasi-complementary metal oxide semiconductor adaptive logic circuits, such as an inverter, not or gate, and not and gate, are successfully fabricated. The simple method, E-doping, adopted in obtaining p/n-type doping of MoTe transistors undoubtedly has provided an approach to create the electronic devices with desired performance.

摘要

通过电热掺杂(E-掺杂)工艺,实现了二碲化钼(MoTe )晶体管的精确可控和可逆 p/n 型电子掺杂。E-掺杂包括在真空中由电场引起的电热退火,这导致电子(n 型)掺杂和暴露于空气中,这导致空穴(p 型)掺杂。掺杂源于氧分子或水蒸气与 MoTe 表面碲缺陷之间的相互作用,并允许对 MoTe 晶体管的 p/n 型电掺杂进行精确控制。由于在 MoTe 的 E-掺杂过程中不使用掺杂剂或特殊气体,因此 E-掺杂是一种简单有效的方法。此外,通过对 MoTe 晶体管的 p/n 型掺杂的精确控制,成功地制造了准互补金属氧化物半导体自适应逻辑电路,如反相器、或非门和与非门。用于获得 MoTe 晶体管的 p/n 型掺杂的这种简单方法 E-掺杂无疑为创建具有所需性能的电子设备提供了一种途径。

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