Schmerbauch A E M, Vasquez-Beltran M A, Vakis A I, Huisman R, Jayawardhana B
Appl Opt. 2020 Sep 20;59(27):8077-8088. doi: 10.1364/AO.397472.
We present modeling and analysis of a hysteretic deformable mirror where the facesheet interacts with a continuous layer of piezoelectric material that can be actuated distributively by a matrix of electrodes through multiplexing. Moreover, a method to calculate the actuator influence functions is described considering the particular arrangement of electrodes. The results are presented in a semi-analytical model to describe the facesheet's deformation caused by a high-density array of actuators, and validated in a simulation. The proposed modeling of an interconnection layout of electrodes is used to determine the optimal pressures the actuators must exert to achieve a desired surface deformation.
