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基于声子晶体的声表面波磁场传感器

Phononic-Crystal-Based SAW Magnetic-Field Sensors.

作者信息

Samadi Mohsen, Schmalz Julius, Meyer Jana Marie, Lofink Fabian, Gerken Martina

机构信息

Integrated Systems and Photonics, Department of Electrical and Information Engineering, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.

Fraunhofer Institute for Silicon Technology ISIT, 25524 Itzehoe, Germany.

出版信息

Micromachines (Basel). 2023 Nov 20;14(11):2130. doi: 10.3390/mi14112130.

Abstract

In this theoretical study, we explore the enhancement of sensing capabilities in surface acoustic wave (SAW)-based magnetic field sensors through the integration of engineered phononic crystals (PnCs). We particularly focus on amplifying the interaction between the SAW and magnetostrictive materials within the PnC structure. Through comprehensive simulations, we demonstrate the synchronization between the SAWs generated by IDTs and the resonant modes of PnCs, thereby leading to an enhancement in sensitivity. Furthermore, we investigate the Δ effect, highlighting the sensor's responsiveness to changes in external magnetic fields, and quantify its magnetic sensitivity through observable changes in the SAW phase velocity leading to phase shifts at the end of the delay line. Notably, our approach yields a magnetic field sensitivity of approximately S~138 °mT for a delay line length of only 77 µm in homogeneous magnetic fields. Our findings underline the potential of PnCs to advance magnetic field sensing. This research offers insights into the integration of engineered materials for improved sensor performance, paving the way for more effective and accurate magnetic field detection solutions.

摘要

在这项理论研究中,我们通过集成工程声子晶体(PnC)来探索基于表面声波(SAW)的磁场传感器传感能力的增强。我们特别关注放大PnC结构内SAW与磁致伸缩材料之间的相互作用。通过全面的模拟,我们证明了叉指换能器(IDT)产生的SAW与PnC的共振模式之间的同步,从而导致灵敏度提高。此外,我们研究了Δ效应,突出了传感器对外部磁场变化的响应,并通过SAW相速度的可观测变化导致延迟线末端的相移来量化其磁灵敏度。值得注意的是,在均匀磁场中,对于仅77 µm的延迟线长度,我们的方法产生的磁场灵敏度约为S~138 °mT。我们的研究结果强调了PnC在推进磁场传感方面的潜力。这项研究为集成工程材料以提高传感器性能提供了见解,为更有效和准确的磁场检测解决方案铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fa6c/10672980/3acbf2d27e4b/micromachines-14-02130-g001.jpg

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