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用于生物医学应用中精密纳米结构制造的光刻技术进展。

Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications.

作者信息

Stokes Kate, Clark Kieran, Odetade David, Hardy Mike, Goldberg Oppenheimer Pola

机构信息

Advanced Nanomaterials Structures and Applications Laboratories, School of Chemical Engineering, College of Engineering and Physical Sciences, University of Birmingham, Edgbaston, Birmingham, B15 2TT, UK.

School of Biological Sciences, Institute for Global Food Security, Queen's University Belfast, Belfast, BT9 5DL, UK.

出版信息

Discov Nano. 2023 Dec 11;18(1):153. doi: 10.1186/s11671-023-03938-x.


DOI:10.1186/s11671-023-03938-x
PMID:38082047
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10713959/
Abstract

Nano-fabrication techniques have demonstrated their vital importance in technological innovation. However, low-throughput, high-cost and intrinsic resolution limits pose significant restrictions, it is, therefore, paramount to continue improving existing methods as well as developing new techniques to overcome these challenges. This is particularly applicable within the area of biomedical research, which focuses on sensing, increasingly at the point-of-care, as a way to improve patient outcomes. Within this context, this review focuses on the latest advances in the main emerging patterning methods including the two-photon, stereo, electrohydrodynamic, near-field electrospinning-assisted, magneto, magnetorheological drawing, nanoimprint, capillary force, nanosphere, edge, nano transfer printing and block copolymer lithographic technologies for micro- and nanofabrication. Emerging methods enabling structural and chemical nano fabrication are categorised along with prospective chemical and physical patterning techniques. Established lithographic techniques are briefly outlined and the novel lithographic technologies are compared to these, summarising the specific advantages and shortfalls alongside the current lateral resolution limits and the amenability to mass production, evaluated in terms of process scalability and cost. Particular attention is drawn to the potential breakthrough application areas, predominantly within biomedical studies, laying the platform for the tangible paths towards the adoption of alternative developing lithographic technologies or their combination with the established patterning techniques, which depends on the needs of the end-user including, for instance, tolerance of inherent limits, fidelity and reproducibility.

摘要

纳米制造技术已在技术创新中展现出其至关重要的地位。然而,低通量、高成本以及固有的分辨率限制构成了重大制约因素,因此,持续改进现有方法以及开发新技术以克服这些挑战至关重要。这在生物医学研究领域尤为适用,该领域越来越注重即时检测传感,以此作为改善患者治疗效果的一种方式。在此背景下,本综述聚焦于主要新兴图案化方法的最新进展,包括用于微纳制造的双光子、立体、电流体动力学、近场静电纺丝辅助、磁控、磁流变绘图、纳米压印、毛细力、纳米球、边缘、纳米转移印刷和嵌段共聚物光刻技术。能够实现结构和化学纳米制造的新兴方法与潜在的化学和物理图案化技术一同进行了分类。简要概述了既定的光刻技术,并将新型光刻技术与之进行了比较,总结了其具体优势和不足,以及当前的横向分辨率限制和大规模生产的适用性,从工艺可扩展性和成本方面进行了评估。特别关注了潜在的突破性应用领域,主要是在生物医学研究领域,为采用替代性新兴光刻技术或将其与既定图案化技术相结合的切实可行路径奠定了基础,这取决于终端用户的需求,例如对固有局限性的容忍度、保真度和可重复性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/3c8bf14d00ab/11671_2023_3938_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/8f0f6459313d/11671_2023_3938_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/00d5d6d762c6/11671_2023_3938_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/951beef03fb0/11671_2023_3938_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/1c98cae13b9f/11671_2023_3938_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/be74624db529/11671_2023_3938_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/3c8bf14d00ab/11671_2023_3938_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/8f0f6459313d/11671_2023_3938_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/00d5d6d762c6/11671_2023_3938_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/951beef03fb0/11671_2023_3938_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/1c98cae13b9f/11671_2023_3938_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/be74624db529/11671_2023_3938_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0431/10713959/3c8bf14d00ab/11671_2023_3938_Fig6_HTML.jpg

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本文引用的文献

[1]
Methods for extending working distance using modified photonic crystal for near-field lithography.

Nanotechnology. 2023-11-15

[2]
Preparation, Properties, and Bioapplications of Block Copolymer Nanopatterns.

Adv Healthc Mater. 2024-1

[3]
Plasmonic Biosensors with Nanostructure for Healthcare Monitoring and Diseases Diagnosis.

Sensors (Basel). 2022-12-31

[4]
Performance Enhancement of Electrochemiluminescence with the Immunosensor Controlled Using Magnetized Masks for the Determination of Epithelial Cancer Biomarker EpCAM.

Anal Chem. 2023-1-17

[5]
Fabrication of Nanostructured Polycaprolactone (PCL) Film Using a Thermal Imprinting Technique and Assessment of Antibacterial Function for Its Application.

Polymers (Basel). 2022-12-16

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A Study on the Resolution and Depth of Focus of ArF Immersion Photolithography.

Micromachines (Basel). 2022-11-14

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Nat Commun. 2022-11-7

[8]
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Sci Rep. 2022-7-29

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Integrated Urinalysis Devices Based on Interface-Engineered Field-Effect Transistor Biosensors Incorporated With Electronic Circuits.

Adv Mater. 2022-9

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Microsyst Nanoeng. 2022-7-4

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