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用于评估组装在铜基板上的氮化镓发光二极管和硅芯片局部应变的显微拉曼光谱法

Micro-Raman for Local Strain Evaluation of GaN LEDs and Si Chips Assembled on Cu Substrates.

作者信息

Brugnolotto Enrico, Mezzalira Claudia, Conti Fosca, Pedron Danilo, Signorini Raffaella

机构信息

Department of Chemical Science, University of Padova, Via Marzolo 1, 35131 Padova, Italy.

Consorzio Interuniversitario Nazionale per la Scienza e Tecnologia dei Materiali, Via G. Giusti 9, 50121 Firenze, Italy.

出版信息

Micromachines (Basel). 2023 Dec 22;15(1):25. doi: 10.3390/mi15010025.

Abstract

Integrated circuits are created by interfacing different materials, semiconductors, and metals, which are appropriately deposited or grown on substrates and layers soldered together. Therefore, the characteristics of starting materials and process temperatures are of great importance, as they can induce residual strains in the final assembly. Identifying and quantifying strain becomes strategically important in optimizing processes to enhance the performance, duration, and reliability of final devices. This work analyzes the thermomechanical local strain of semiconductor materials used to realize LED modules for lighting applications. Gallium Nitride active layers grown on sapphire substrates and Si chips are assembled by soldering with eutectic AuSn on copper substrates and investigated by Raman spectroscopy in a temperature range of -50 to 180 °C. From the Raman mapping of many different samples, it is concluded that one of the leading causes of strain in the GaN layer can be attributed to the differences in the thermal expansion coefficient among the various materials and, above all, among the chip, interconnection material, and substrate. These differences are responsible for forces that slightly bend the chip, causing strain in the GaN layer, which is most compressed in the central region of the chip and slightly stretched in the outer areas.

摘要

集成电路是通过将不同的材料、半导体和金属进行连接而制造出来的,这些材料被适当地沉积或生长在基板上,并将各层焊接在一起。因此,起始材料的特性和工艺温度非常重要,因为它们会在最终组件中产生残余应变。在优化工艺以提高最终器件的性能、使用寿命和可靠性方面,识别和量化应变具有重要的战略意义。这项工作分析了用于实现照明应用的发光二极管(LED)模块的半导体材料的热机械局部应变。在蓝宝石衬底上生长的氮化镓有源层和硅芯片通过在铜衬底上用共晶金锡进行焊接组装,并在-50至180°C的温度范围内用拉曼光谱进行研究。从许多不同样品的拉曼映射图可以得出结论,氮化镓层中应变的主要原因之一可归因于各种材料之间,尤其是芯片、互连材料和衬底之间热膨胀系数的差异。这些差异会产生使芯片轻微弯曲的力,从而在氮化镓层中引起应变,该应变在芯片的中心区域被最大程度地压缩,而在外部区域则被轻微拉伸。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fa3c/10820995/c0fe4685f96c/micromachines-15-00025-g001.jpg

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