Lin Chen, Zhou Siyu, Shi Liheng, Yang Yuetang, Wu Guanhao
Opt Lett. 2024 Feb 1;49(3):526-529. doi: 10.1364/OL.510645.
Heterodyne interferometry is a powerful tool for achieving high precision and fast measurement. We developed an angle measurement system based on heterodyne interferometry by combining discrete equal-spacing longitudinal modes of optical frequency comb with an acousto-optic modulator. Using a self-designed grating-corner-cube sensor, this method can achieve a two-dimensional angle measurement with sub-arcsecond accuracy and megahertz (MHz) update rate. We experimentally demonstrate a precision of 0.073 arcsec under a 3 MHz update rate, and comparison residuals are kept within 0.063 arcsec over 300 arcsec when compared to a piezo stage. In the dynamic measurement of a 40 Hz frequency, the continuous sinusoidal motion of 0.05 arcsec can be clearly distinguished and reconstructed.
外差干涉测量法是实现高精度和快速测量的强大工具。我们通过将光学频率梳的离散等间距纵向模式与声光调制器相结合，开发了一种基于外差干涉测量法的角度测量系统。使用自行设计的光栅角锥棱镜传感器，该方法可以实现亚角秒精度和兆赫兹（MHz）更新速率的二维角度测量。我们通过实验证明，在3 MHz更新速率下精度为0.073角秒，与压电平台相比，在超过300角秒的范围内比较残差保持在0.063角秒以内。在40 Hz频率的动态测量中，可以清晰地分辨和重建0.05角秒的连续正弦运动。
