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基于光栅角锥棱镜的横滚角传感器

Grating-Corner-Cube-Based Roll Angle Sensor.

作者信息

Zhou Siyu, Le Vunam, Mi Qinggai, Wu Guanhao

机构信息

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.

出版信息

Sensors (Basel). 2020 Sep 27;20(19):5524. doi: 10.3390/s20195524.

DOI:10.3390/s20195524
PMID:32992460
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7582768/
Abstract

This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within ±2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields.

摘要

本文提出了一种专门设计的用于精确测量横滚角的光栅-角锥棱镜传感器。由于透射光栅的衍射特性和角锥棱镜的反射特性,自然地构建了两条空间分离的平行光束。通过对两条平行光束位置的差分检测,我们通过实验证明了在高刷新率下精确测量横滚角的可能性。对所提出技术的性能评估表明,在5分钟内稳定性为0.46角秒。与在500角秒范围内的商用自准直仪相比,残余误差保持在±2角秒以内,标准偏差为1.37角秒。此外,使用所提出的方法可以实现0.8角秒的分辨率。所开发的紧凑型横滚角传感器在学术和工业领域具有潜在的应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a525/7582768/656e388b3212/sensors-20-05524-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a525/7582768/1f6d28da811f/sensors-20-05524-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a525/7582768/656e388b3212/sensors-20-05524-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a525/7582768/1f6d28da811f/sensors-20-05524-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a525/7582768/656e388b3212/sensors-20-05524-g004.jpg

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本文引用的文献

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Multi-pulse sampling dual-comb ranging method.多脉冲采样双梳测距方法。
Opt Express. 2020 Feb 3;28(3):4058-4066. doi: 10.1364/OE.382943.
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Simplified phase-stable dual-comb interferometer for short dynamic range distance measurement.
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Robust roll angular error measurement system for precision machines.
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