Zhou Siyu, Le Vunam, Mi Qinggai, Wu Guanhao
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Sensors (Basel). 2020 Sep 27;20(19):5524. doi: 10.3390/s20195524.
This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within ±2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields.
本文提出了一种专门设计的用于精确测量横滚角的光栅-角锥棱镜传感器。由于透射光栅的衍射特性和角锥棱镜的反射特性,自然地构建了两条空间分离的平行光束。通过对两条平行光束位置的差分检测,我们通过实验证明了在高刷新率下精确测量横滚角的可能性。对所提出技术的性能评估表明,在5分钟内稳定性为0.46角秒。与在500角秒范围内的商用自准直仪相比,残余误差保持在±2角秒以内,标准偏差为1.37角秒。此外,使用所提出的方法可以实现0.8角秒的分辨率。所开发的紧凑型横滚角传感器在学术和工业领域具有潜在的应用。