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具有优化结构的基于AlGaN的高热性能紫外线(368纳米)倒装芯片发光二极管。

High Thermal Performance Ultraviolet (368 nm) AlGaN-Based Flip-Chip LEDs with an Optimized Structure.

作者信息

Sun Guanlang, Dong Taige, Luo Aixin, Yang Jiachen, Dong Ying, Du Guangda, Hong Zekai, Qin Chuyu, Fan Bingfeng

机构信息

School of Physics and Optoelectronic Engineering, Foshan University, Foshan 528225, China.

Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Optoelectronic Technology, Foshan University, Foshan 528225, China.

出版信息

Nanomaterials (Basel). 2024 Jan 26;14(3):267. doi: 10.3390/nano14030267.

DOI:10.3390/nano14030267
PMID:38334537
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10856907/
Abstract

In this study, we have fabricated a 368 nm LED with an epitaxial Indium Tin Oxide (ITO) contact layer. We analyze the thermal performance of the flip-chip LED with a symmetric electrode and metal reflective layer, applying ANSYS to build a coupled electro-thermal finite element model (FEM) of the temperature distribution in the multiple quantum wells (MQWs). We compare our system with the traditional Au-bump flip-chip LED and a flip-chip LED with a Distributed Bragg Reflector (DBR) layer. The simulation results have shown that the flip-chip LED with a metal reflective layer and symmetric electrode exhibits better heat dissipation performance, particularly at high input power. The influence of the insulating layer on the LED chip junction temperature is also examined. The simulation data establish an effect due to the thermal conductivity of the insulating layer in terms of heat dissipation, but this effect is negligible at an insulation layer thickness ≤1 µm.

摘要

在本研究中,我们制造了一种带有外延铟锡氧化物(ITO)接触层的368纳米发光二极管。我们分析了具有对称电极和金属反射层的倒装芯片发光二极管的热性能,应用ANSYS构建了多量子阱(MQW)中温度分布的电热耦合有限元模型(FEM)。我们将我们的系统与传统的金凸点倒装芯片发光二极管以及带有分布式布拉格反射器(DBR)层的倒装芯片发光二极管进行了比较。模拟结果表明,具有金属反射层和对称电极的倒装芯片发光二极管具有更好的散热性能,尤其是在高输入功率下。还研究了绝缘层对发光二极管芯片结温的影响。模拟数据证实了绝缘层的热导率在散热方面的作用,但在绝缘层厚度≤1微米时,这种作用可以忽略不计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/5cdb73704ae1/nanomaterials-14-00267-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/1c403435038d/nanomaterials-14-00267-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/bae77eb6e0c2/nanomaterials-14-00267-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/e4ec16255e01/nanomaterials-14-00267-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/39b3e6e4e666/nanomaterials-14-00267-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/5cdb73704ae1/nanomaterials-14-00267-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/1c403435038d/nanomaterials-14-00267-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/bae77eb6e0c2/nanomaterials-14-00267-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/e4ec16255e01/nanomaterials-14-00267-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/39b3e6e4e666/nanomaterials-14-00267-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9818/10856907/5cdb73704ae1/nanomaterials-14-00267-g005.jpg

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本文引用的文献

1
A Study on Optimal Indium Tin Oxide Thickness as Transparent Conductive Electrodes for Near-Ultraviolet Light-Emitting Diodes.氧化铟锡作为近紫外发光二极管透明导电电极的最佳厚度研究。
Materials (Basel). 2023 Jun 29;16(13):4718. doi: 10.3390/ma16134718.
2
Impact of roughening density on the light extraction efficiency of thin-film flip-chip ultraviolet LEDs grown on SiC.粗糙度密度对在碳化硅上生长的薄膜倒装芯片紫外发光二极管光提取效率的影响。
Opt Express. 2019 Aug 5;27(16):A1074-A1083. doi: 10.1364/OE.27.0A1074.
3
Highly efficient GaN-based high-power flip-chip light-emitting diodes.
高效的基于氮化镓的高功率倒装芯片发光二极管。
Opt Express. 2019 Jun 10;27(12):A669-A692. doi: 10.1364/OE.27.00A669.
4
Light-extraction enhancement of GaN-based 395  nm flip-chip light-emitting diodes by an Al-doped ITO transparent conductive electrode.通过掺铝 ITO 透明导电电极增强 GaN 基 395nm 倒装芯片发光二极管的出光效率。
Opt Lett. 2018 Jun 1;43(11):2684-2687. doi: 10.1364/OL.43.002684.
5
Numerical Analysis of the Temperature Impact on Performance of GaN-Based 460-nm Light-Emitting Diode.温度对基于氮化镓的460纳米发光二极管性能影响的数值分析
J Nanosci Nanotechnol. 2018 Mar 1;18(3):1772-1776. doi: 10.1166/jnn.2018.14942.
6
Numerical simulation and experimental investigation of GaN-based flip-chip LEDs and top-emitting LEDs.基于氮化镓的倒装芯片发光二极管和顶部发射发光二极管的数值模拟与实验研究。
Appl Opt. 2017 Dec 1;56(34):9502-9509. doi: 10.1364/AO.56.009502.
7
Numerical and experimental investigation of GaN-based flip-chip light-emitting diodes with highly reflective Ag/TiW and ITO/DBR Ohmic contacts.基于GaN的倒装芯片发光二极管的数值与实验研究,其具有高反射率的Ag/TiW和ITO/DBR欧姆接触。
Opt Express. 2017 Oct 30;25(22):26615-26627. doi: 10.1364/OE.25.026615.
8
High performance GaN-based flip-chip LEDs with different electrode patterns.具有不同电极图案的高性能氮化镓基倒装芯片发光二极管。
Opt Express. 2014 May 5;22 Suppl 3:A941-6. doi: 10.1364/OE.22.00A941.
9
Near ultraviolet InGaN/AlGaN-based light-emitting diodes with highly reflective tin-doped indium oxide/Al-based reflectors.基于近紫外InGaN/AlGaN的发光二极管,带有高反射性的掺锡氧化铟/铝基反射器。
Opt Express. 2013 Nov 4;21(22):26774-9. doi: 10.1364/OE.21.026774.