Xu Ke, Leng Houwen
School of Electrical & Control Engineering, Shenyang Jianzhu University, Shenyang 110168, China.
Beilstein J Nanotechnol. 2024 Feb 14;15:230-241. doi: 10.3762/bjnano.15.22. eCollection 2024.
To comprehensively study the influence of atomic force microscopy (AFM) scanning parameters on tip wear, a tip wear assessment method based on sharp structures is proposed. This research explored the wear of AFM tips during tapping mode and examined the effects of scanning parameters on estimated tip diameter and surface roughness. The experiment results show that the non-destructive method for measuring tip morphology is highly repeatable. Additionally, a set of principles for optimizing scanning parameters has been proposed. These principles consider both scanning precision and tip wear. To achieve these results, an AFM probe was used to scan sharp structures, precisely acquiring the tip morphology. Tip wear was minimized by employing lower scanning frequency and free amplitude, and a set point of approximately 0.2, resulting in clear, high-quality AFM images.
为全面研究原子力显微镜(AFM)扫描参数对针尖磨损的影响,提出了一种基于尖锐结构的针尖磨损评估方法。本研究探讨了轻敲模式下AFM针尖的磨损情况,并研究了扫描参数对估计针尖直径和表面粗糙度的影响。实验结果表明,测量针尖形貌的无损方法具有高度可重复性。此外,还提出了一套优化扫描参数的原则。这些原则兼顾了扫描精度和针尖磨损。为得到这些结果,使用AFM探针扫描尖锐结构,精确获取针尖形貌。通过采用较低的扫描频率、自由振幅和约0.2的设定点,使针尖磨损最小化,从而获得清晰、高质量的AFM图像。