Lulinsky Stella, Torteman Ben, Ilic Bojan R, Krylov Slava
School of Mechanical Engineering, Faculty of Engineereing, Tel Aviv University, Ramat Aviv, Tel Aviv 69978, Israel.
Center of Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
Micromachines (Basel). 2024 Feb 9;15(2):257. doi: 10.3390/mi15020257.
We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu-Duffing equation, obtained using the Galerkin order reduction technique. Our experimental results show that omnidirectional acoustic pressure used as a noncontact source for linear harmonic driving is a convenient and versatile tool for the mechanical dynamic characterization of unpackaged, nonintegrated microstructures. The fringing field's electrostatic actuation allows for efficient parametric amplification of an acoustic signal. The suggested amplification approach may have applications in a wide variety of micromechanical devices, including resonant sensors, microphones and microphone arrays, and hearing aids. It can be used also for upward frequency tuning.
我们报告了关于由边缘场静电驱动的微机械单晶硅悬臂梁中声激发振动的参量放大的理论和实验研究。使用Galerkin降阶技术得到的Mathieu-Duffing方程对器件动力学进行了分析。我们的实验结果表明，用作线性谐波驱动的非接触源的全向声压是用于未封装、非集成微结构的机械动态表征的便捷且通用的工具。边缘场的静电驱动允许对声信号进行高效的参量放大。所提出的放大方法可能在包括谐振传感器、麦克风和麦克风阵列以及助听器在内的各种微机械设备中有应用。它还可用于向上频率调谐。
