Brenner Kevin, Ergun Arif Sanli, Firouzi Kamyar, Rasmussen Morten Fischer, Stedman Quintin, Khuri-Yakub Butrus Pierre
E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USA.
Faculty of Engineering, TOBB University of Economics and Technology, Ankara 06560, Turkey.
Micromachines (Basel). 2019 Feb 23;10(2):152. doi: 10.3390/mi10020152.
Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.
电容式微机械超声换能器（CMUT）技术在过去十年中得到了快速发展。制造和集成方面的进步，再加上建模的改进，使得CMUT能够进入主流超声成像系统并取得商业成功。在这篇综述论文中，我们探讨了CMUT技术在各个抽象层面的最新进展；建模、制造、集成和应用。关于应用，我们讨论了CMUT的未来趋势及其在生物医学成像广泛领域中的影响。
