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使用有机-无机TiO杂化纳米颗粒制备低温溶液法高κ栅介质

Preparation of Low-Temperature Solution-Processed High-κ Gate Dielectrics Using Organic-Inorganic TiO Hybrid Nanoparticles.

作者信息

Le Hong Nhung, Wang Rixuan, Hou Benliang, Kim Sehyun, Kim Juyoung

机构信息

Nanocomposite Structure Polymer Laboratory, Department of Advanced Materials Engineering, Kangwon National University, Samcheok 25913, Republic of Korea.

School of Chemical Engineering, Yeungnam University, Gyeongsan 38541, Republic of Korea.

出版信息

Nanomaterials (Basel). 2024 Mar 8;14(6):488. doi: 10.3390/nano14060488.

DOI:10.3390/nano14060488
PMID:38535635
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10975094/
Abstract

Organic-inorganic hybrid dielectric nanomaterials are vital for OTFT applications due to their unique combination of organic dielectric and inorganic properties. Despite the challenges in preparing stable titania (TiO) nanoparticles, we successfully synthesized colloidally stable organic-inorganic (O-I) TiO hybrid nanoparticles using an amphiphilic polymer as a stabilizer through a low-temperature sol-gel process. The resulting O-I TiO hybrid sols exhibited long-term stability and formed a high-quality dielectric layer with a high dielectric constant (κ) and minimal leakage current density. We also addressed the effect of the ethylene oxide chain within the hydrophilic segment of the amphiphilic polymer on the dielectric properties of the coating film derived from O-I TiO hybrid sols. Using the O-I TiO hybrid dielectric layer with excellent insulating properties enhanced the electrical performance of the gate dielectrics, including superior field-effect mobility and stable operation in OTFT devices. We believe that this study provides a reliable method for the preparation of O-I hybrid TiO dielectric materials designed to enhance the operational stability and electrical performance of OTFTs.

摘要

有机-无机杂化介电纳米材料因其有机介电和无机特性的独特组合,对有机薄膜晶体管(OTFT)应用至关重要。尽管在制备稳定的二氧化钛(TiO)纳米颗粒方面存在挑战,但我们通过低温溶胶-凝胶法,以两亲聚合物作为稳定剂,成功合成了具有胶体稳定性的有机-无机(O-I)TiO杂化纳米颗粒。所得的O-I TiO杂化溶胶表现出长期稳定性,并形成了具有高介电常数(κ)和最小漏电流密度的高质量介电层。我们还研究了两亲聚合物亲水链段中的环氧乙烷链对由O-I TiO杂化溶胶衍生的涂膜介电性能的影响。使用具有优异绝缘性能的O-I TiO杂化介电层提高了栅极电介质的电学性能,包括在OTFT器件中具有优异的场效应迁移率和稳定的操作。我们相信这项研究为制备旨在提高OTFT操作稳定性和电学性能的O-I杂化TiO介电材料提供了一种可靠的方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/c2700796013c/nanomaterials-14-00488-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/cc93e9b5c478/nanomaterials-14-00488-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/25db72202423/nanomaterials-14-00488-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/107806f92ebd/nanomaterials-14-00488-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/0059dd6a87c3/nanomaterials-14-00488-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/53fb421f76a4/nanomaterials-14-00488-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/cdd9bfc600bb/nanomaterials-14-00488-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/b5b8f81051c6/nanomaterials-14-00488-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/ee41de2ac447/nanomaterials-14-00488-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/c2700796013c/nanomaterials-14-00488-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/cc93e9b5c478/nanomaterials-14-00488-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/25db72202423/nanomaterials-14-00488-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/107806f92ebd/nanomaterials-14-00488-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/0059dd6a87c3/nanomaterials-14-00488-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/53fb421f76a4/nanomaterials-14-00488-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/cdd9bfc600bb/nanomaterials-14-00488-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/b5b8f81051c6/nanomaterials-14-00488-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/ee41de2ac447/nanomaterials-14-00488-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e7a2/10975094/c2700796013c/nanomaterials-14-00488-g009.jpg

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