Liu Yujian, Li Cheng, Li Jing, Wan Zhen, Fan Shangchun
Opt Lett. 2024 Apr 1;49(7):1790-1793. doi: 10.1364/OL.521357.
This study proposes a high-sensitivity resonant graphene accelerometer based on a pressure-induced sensing mechanism. The accelerometer design encompasses an optical fiber and a vacuum-sealed graphene resonator affixed to a silicon sensitive film, incorporating a proof mass. This indirect sensing mechanism effectively mitigates the vibration mode aliasing of graphene and the proof mass while ensuring a minimal energy loss in the operating resonator. The mechanical vibration of graphene is excited and detected through an all-fiber optical system. Notably, the proposed sensor demonstrates a sensitivity of 34.3 kHz/g within the range of 0-3.5 g, which is eight times higher than comparable accelerometers utilizing a proof mass on a graphene membrane. This work exhibits a novel, to the best of our knowledge, approach to an acceleration measurement using 2D resonators, exhibiting distinct advantages in terms of compact size and heightened sensitivity.
本研究提出了一种基于压力感应机制的高灵敏度谐振石墨烯加速度计。该加速度计的设计包括一根光纤和一个固定在硅敏感膜上的真空密封石墨烯谐振器，并包含一个质量块。这种间接传感机制有效地减轻了石墨烯和质量块的振动模式混叠，同时确保工作谐振器中的能量损失最小。石墨烯的机械振动通过全光纤光学系统进行激发和检测。值得注意的是，所提出的传感器在0-3.5g范围内的灵敏度为34.3kHz/g，比在石墨烯膜上使用质量块的同类加速度计高八倍。据我们所知，这项工作展示了一种使用二维谐振器进行加速度测量的新颖方法，在尺寸紧凑和灵敏度提高方面具有明显优势。
