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一种基于三自由度弱耦合谐振器模式定位的具有高灵敏度、低非线性和大动态范围的低重力微机电系统加速度计。

A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators.

作者信息

Saleem Muhammad Mubasher, Saghir Shayaan, Bukhari Syed Ali Raza, Hamza Amir, Shakoor Rana Iqtidar, Bazaz Shafaat Ahmed

机构信息

Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan.

National Centre of Robotics and Automation (NCRA), Islamabad 44000, Pakistan.

出版信息

Micromachines (Basel). 2021 Mar 16;12(3):310. doi: 10.3390/mi12030310.

DOI:10.3390/mi12030310
PMID:33809735
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8002230/
Abstract

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 μμg/Hz and nonlinearity less than 0.5%.

摘要

本文提出了一种基于微机电系统（MEMS）的新型低g加速度计设计，该加速度计利用三自由度（3-DoF）弱耦合MEMS谐振器中的模式定位效应。在单个检测质量块的两侧使用两组3-DoF机械耦合谐振器，并将两组谐振器的振幅比差异作为输入加速度测量的输出指标。检测质量块通过静电耦合到扰动谐振器，为了实现MEMS加速度计的灵敏度和输入动态范围调谐，在两组3-DoF耦合谐振器中的每个谐振器上都使用了静电电极。该MEMS加速度计的设计考虑了绝缘体上硅多用户MEMS工艺（SOIMUMPs）的代工工艺限制。通过基于有限元方法（FEM）的模拟分析了MEMS加速度计的性能。对于±2 g的输入加速度范围，基于热机械噪声的分辨率为0.22 μμg/Hz且非线性小于0.5%，该MEMS加速度计在振幅比差异方面的灵敏度为10.61/g。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/c32269c547e5/micromachines-12-00310-g021.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/4e9418dacce7/micromachines-12-00310-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/9f3e73e2a116/micromachines-12-00310-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/1b8acf7da268/micromachines-12-00310-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/c32269c547e5/micromachines-12-00310-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/78dfa862b1cf/micromachines-12-00310-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/78cc563ed4cf/micromachines-12-00310-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/aedc32dac921/micromachines-12-00310-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/ef80d216d9bd/micromachines-12-00310-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/0a5a6790d154/micromachines-12-00310-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/1d519d8ac3c1/micromachines-12-00310-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/23dadd41e160/micromachines-12-00310-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/2396ce8a8077/micromachines-12-00310-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/4832ea7a6775/micromachines-12-00310-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/4e9418dacce7/micromachines-12-00310-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/9f3e73e2a116/micromachines-12-00310-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/8d55bdc37ed1/micromachines-12-00310-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/1b8acf7da268/micromachines-12-00310-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/f377b18785ad/micromachines-12-00310-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/0f81c74e15b2/micromachines-12-00310-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/12cc1923d5c7/micromachines-12-00310-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/f8502ef217c0/micromachines-12-00310-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/63e077448404/micromachines-12-00310-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/14118e77031d/micromachines-12-00310-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/8653edacc27c/micromachines-12-00310-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/37fc/8002230/c32269c547e5/micromachines-12-00310-g021.jpg

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2
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Sensors (Basel). 2018 Sep 16;18(9):3124. doi: 10.3390/s18093124.
3
Development of a High-Sensitivity Wireless Accelerometer for Structural Health Monitoring.
Sensors (Basel). 2022 Jul 14;22(14):5264. doi: 10.3390/s22145264.
用于结构健康监测的高灵敏度无线加速度计的研制。
Sensors (Basel). 2018 Jan 17;18(1):262. doi: 10.3390/s18010262.
4
Quantitative Assessment of Parkinsonian Tremor Based on an Inertial Measurement Unit.基于惯性测量单元的帕金森震颤定量评估
Sensors (Basel). 2015 Sep 29;15(10):25055-71. doi: 10.3390/s151025055.
5
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Sensors (Basel). 2013 Nov 19;13(11):15785-804. doi: 10.3390/s131115785.
6
Neurological tremor: sensors, signal processing and emerging applications.神经震颤：传感器、信号处理和新兴应用。
Sensors (Basel). 2010;10(2):1399-422. doi: 10.3390/s100201399. Epub 2010 Feb 24.