Advanced NEMS Group, École Polytechnique Féderale de Lausanne (EPFL), Lausanne, 1015, Switzerland.
Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, SE-10044, Sweden.
Small. 2022 Jul;18(28):e2201816. doi: 10.1002/smll.202201816. Epub 2022 May 30.
Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.
测量振动对于确保建筑物结构安全和机器稳定至关重要。预测性维护是新工业革命中物联网的核心应用之一，随着时间的推移，可持续性和性能的提高将变得至关重要。为了降低振动传感器的占地面积和成本，同时提高其性能，需要新的传感器概念。在这里，利用双层石墨烯膜和悬浮硅验证来展示它们作为共振振动传感器的工作原理，这些传感器在给定的占地面积和质量下表现出出色的性能。揭示的传感效应基于共振转换，对于涉及由外部振动器激励的薄纳米和微机械谐振器的实验研究具有重要意义。
