School of Electro-Mechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
Guangdong Provincial Key Laboratory of Minimally Invasive Surgical Instruments and Manufacturing Technology, Guangdong University of Technology, Guangzhou 510006, China.
Biosensors (Basel). 2024 Mar 27;14(4):158. doi: 10.3390/bios14040158.
Solid-state nanopores have become a prominent tool in the field of single-molecule detection. Conventional solid-state nanopores are thick, which affects the spatial resolution of the detection results. Graphene is the thinnest 2D material and has the highest spatial detection resolution. In this study, a graphene membrane chip was fabricated by combining a MEMS process with a 2D material wet transfer process. Raman spectroscopy was used to assess the quality of graphene after the transfer. The mechanism behind the influence of the processing dose and residence time of the helium ion beam on the processed pore size was investigated. Subsequently, graphene nanopores with diameters less than 10 nm were fabricated via helium ion microscopy. DNA was detected using a 5.8 nm graphene nanopore chip, and the appearance of double-peak signals on the surface of 20 mer DNA was successfully detected. These results serve as a valuable reference for nanopore fabrication using 2D material for DNA analysis.
固态纳米孔已成为单分子检测领域的重要工具。传统的固态纳米孔较厚，这会影响检测结果的空间分辨率。石墨烯是最薄的二维材料，具有最高的空间检测分辨率。在这项研究中，通过将微机电系统工艺与二维材料湿法转移工艺相结合，制造出了石墨烯膜芯片。拉曼光谱用于评估转移后石墨烯的质量。研究了氦离子束的处理剂量和停留时间对处理后孔径的影响机制。随后，通过氦离子显微镜制造出了直径小于 10nm 的石墨烯纳米孔。使用 5.8nm 石墨烯纳米孔芯片检测了 DNA，成功检测到了 20mer DNA 表面的双峰信号。这些结果为使用二维材料进行 DNA 分析的纳米孔制造提供了有价值的参考。
