State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China.
Frontier Institute of Science and Technology (FIST), Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China.
Adv Sci (Weinh). 2024 Jul;11(28):e2403645. doi: 10.1002/advs.202403645. Epub 2024 May 8.
High spatial-resolution detection is essential for biomedical applications and human-machine interaction. However, as the sensor array density increases, the miniaturization will lead to interference between adjacent units and deterioration in sensing performance. Here, inspired by the cochlea's sensing structure, a high-density flexible pressure sensor array featuring with suspended sensing membrane with sensitivity-enhanced customized channels is presented for crosstalk-free and high-resolution detection. By imitating the basilar membrane attached to spiral ligaments, a sensing membrane is fixed onto a high-stiffness substrate with cavities, forming a stable braced isolation to provide an excellent crosstalk-free capability (crosstalk coefficient: 47.24 dB) with high-density integration (100 units within 1 cm). Similar to the opening of ion channels in hair cells, the wedge-type expansion of the embedded cracks introduced by stress concentration structures enables a high sensitivity (0.19 kPa) and a large measuring range (400 kPa). Finally, it demonstrates promising applications in distributed displays and the condition monitoring of medical-surgical intubation.
高空间分辨率检测对于生物医学应用和人机交互至关重要。然而,随着传感器阵列密度的增加,微型化将导致相邻单元之间的干扰,并恶化传感性能。在这里,受耳蜗传感结构的启发,提出了一种具有灵敏度增强定制通道的悬浮式传感膜的高密度柔性压力传感器阵列,用于无串扰和高分辨率检测。通过模仿附着在螺旋韧带上的基底膜,将传感膜固定在带有腔体的高刚性基底上,形成稳定的支撑隔离,提供出色的无串扰能力(串扰系数:47.24dB)和高密度集成(1cm 内 100 个单元)。类似于毛细胞中离子通道的打开,由应力集中结构引入的嵌入式裂缝的楔形扩展实现了高灵敏度(0.19kPa)和大测量范围(400kPa)。最后,它在分布式显示和医疗插管状态监测方面展示了有前景的应用。