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关于商业化学气相沉积六方氮化硼的质量

On the quality of commercial chemical vapour deposited hexagonal boron nitride.

作者信息

Yuan Yue, Weber Jonas, Li Junzhu, Tian Bo, Ma Yinchang, Zhang Xixiang, Taniguchi Takashi, Watanabe Kenji, Lanza Mario

机构信息

Materials Science and Engineering Program, Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal, 23955-6900, Saudi Arabia.

International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan.

出版信息

Nat Commun. 2024 May 28;15(1):4518. doi: 10.1038/s41467-024-48485-w.

Abstract

The semiconductors industry has put its eyes on two-dimensional (2D) materials produced by chemical vapour deposition (CVD) because they can be grown at the wafer level with small thickness fluctuations, which is necessary to build electronic devices and circuits. However, CVD-grown 2D materials can contain significant amounts of lattice distortions, which degrades the performance at the device level and increases device-to-device variability. Here we statistically analyse the quality of commercially available CVD-grown hexagonal boron nitride (h-BN) from the most popular suppliers. h-BN is of strategic importance because it is one of the few insulating 2D materials, and can be used as anti-scattering substrate and gate dielectric. We find that the leakage current and electrical homogeneity of all commercially available CVD h-BN samples are significantly worse than those of mechanically exfoliated h-BN of similar thickness. Moreover, in most cases the properties of the CVD h-BN samples analysed don't match the technical specifications given by the suppliers, and the sample-to-sample variability is unsuitable for the reproducible fabrication of capacitors, transistors or memristors in different batches. In the short term, suppliers should try to provide accurate sample specifications matching the properties of the commercialized materials, and researchers should keep such inaccuracies in mind; and in the middle term suppliers should try to reduce the density of defects to enable the fabrication of high-performance devices with high reliability and reproducibility.

摘要

半导体行业已将目光投向通过化学气相沉积(CVD)生产的二维(2D)材料,因为它们可以在晶圆级生长,厚度波动小,这对于制造电子器件和电路至关重要。然而,CVD生长的二维材料可能包含大量晶格畸变,这会降低器件级性能并增加器件间的变异性。在此,我们对最受欢迎供应商提供的市售CVD生长的六方氮化硼(h-BN)的质量进行了统计分析。h-BN具有战略重要性,因为它是少数绝缘二维材料之一,可用作抗散射衬底和栅极电介质。我们发现,所有市售CVD h-BN样品的漏电流和电均匀性明显比类似厚度的机械剥离h-BN差。此外,在大多数情况下,所分析的CVD h-BN样品的性能与供应商给出的技术规格不匹配,并且样品间的变异性不适用于不同批次电容器、晶体管或忆阻器的可重复制造。短期内,供应商应尝试提供与商业化材料性能匹配的准确样品规格,研究人员应牢记此类不准确之处;从中期来看,供应商应尝试降低缺陷密度,以实现具有高可靠性和可重复性的高性能器件的制造。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/052d/11133478/a5f6e0078ce7/41467_2024_48485_Fig1_HTML.jpg

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