Meltchakov Evgueni, Capitanio Blandine, de Rossi Sébastien, Papagiannouli Irène, Mercère Pascal, Delmotte Franck
Opt Lett. 2024 Jun 15;49(12):3420-3423. doi: 10.1364/OL.523431.
The development of efficient multilayer mirrors for the water window (a spectral region between absorption edges of carbon and oxygen, from 284 to 543 eV) remains a challenge. As the best candidate, the Cr/Sc multilayer provides maximum theoretical reflectivity of about 60% at near-normal incidence around the Sc L absorption edge (397 eV). However, the maximum measured peak reflectance published so far just slightly exceeds 20%. We report on a new (to the best of our knowledge) approach to design more efficient Cr/Sc-based multilayer coatings using the process of nitridation of chromium during deposition and adding boron carbide as a third material in the multilayer structure. We discuss our strategy of optimization of the CrN/BC/Sc multilayer system based on experimental studies. The peak reflectance as high as 32% at 396 eV was measured with this type of coating, which is of main interest for various water window applications such as x-ray microscopy.
开发用于水窗（碳和氧吸收边缘之间的光谱区域，从284至543 eV）的高效多层镜仍然是一项挑战。作为最佳候选材料，Cr/Sc多层膜在接近垂直入射时，在Sc L吸收边缘（397 eV）附近提供约60%的最大理论反射率。然而，迄今为止公布的最大测量峰值反射率仅略超过20%。我们报告了一种新的（据我们所知）方法，即在沉积过程中通过铬的氮化过程设计更高效的基于Cr/Sc的多层涂层，并在多层结构中添加碳化硼作为第三种材料。我们基于实验研究讨论了优化CrN/BC/Sc多层系统的策略。用这种类型的涂层在396 eV处测量到高达32%的峰值反射率，这对于诸如X射线显微镜等各种水窗应用来说至关重要。
