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环境扫描电子显微镜压力条件下自由空间中孔径气体出口处喷嘴形状的数学物理分析

Mathematical-Physics Analyses of the Nozzle Shaping at the Aperture Gas Outlet into Free Space under ESEM Pressure Conditions.

作者信息

Šabacká Pavla, Maxa Jiří, Švecová Jana, Talár Jaroslav, Binar Tomáš, Bayer Robert, Bača Petr, Dostalová Petra, Švarc Jiří

机构信息

Faculty of Electrical Engineering and Communication, Brno University of Technology, Technická 10, 616 00 Brno, Czech Republic.

Institute of Scientific Instruments of the CAS, Královopolská 147, 612 64 Brno, Czech Republic.

出版信息

Sensors (Basel). 2024 May 26;24(11):3436. doi: 10.3390/s24113436.

DOI:10.3390/s24113436
PMID:38894227
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11174927/
Abstract

The paper presents a methodology that combines experimental measurements and mathematical-physics analyses to investigate the flow behavior in a nozzle-equipped aperture associated with the solution of its impact on electron beam dispersion in an environmental scanning electron microscope (ESEM). The shape of the nozzle significantly influences the character of the supersonic flow beyond the aperture, especially the shape and type of shock waves, which are highly dense compared to the surrounding gas. These significantly affect the electron scattering, which influences the resulting image. This paper analyzes the effect of aperture and nozzle shaping under specific low-pressure conditions and its impact on the electron dispersion of the primary electron beam.

摘要

本文提出了一种将实验测量与数学物理分析相结合的方法，以研究配备喷嘴的孔径内的流动行为，及其对环境扫描电子显微镜（ESEM）中电子束散射的影响。喷嘴的形状对孔径外的超音速流特性有显著影响，特别是与周围气体相比密度极高的冲击波的形状和类型。这些因素对电子散射有显著影响，进而影响最终的图像。本文分析了在特定低压条件下孔径和喷嘴形状的影响及其对一次电子束电子散射的影响。

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