Ye Jiatong, Zhao Tiancong, Zhang Hangyu
School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian 116024, China.
Liaoning Key Laboratory of Integrated Circuit and Biomedical Electronic System, Dalian University of Technology, Dalian 116024, China.
Sensors (Basel). 2024 Jun 17;24(12):3907. doi: 10.3390/s24123907.
Smart wearable devices are extensively utilized across diverse domains due to their inherent advantages of flexibility, portability, and real-time monitoring. Among these, flexible sensors demonstrate exceptional pliability and malleability, making them a prominent focus in wearable electronics research. However, the implementation of flexible wearable sensors often entails intricate and time-consuming processes, leading to high costs, which hinder the advancement of the entire field. Here, we report a pressure and proximity sensor based on oxidized laser-induced graphene (oxidized LIG) as a dielectric layer sandwiched by patterned LIG electrodes, which is characterized by high speed and cost-effectiveness. It is found that in the low-frequency range of fewer than 0.1 kHz, the relative dielectric constant of the oxidized LIG layer reaches an order of magnitude of 104. The pressure mode of this bimodal capacitive sensor is capable of detecting pressures within the range of 1.34 Pa to 800 Pa, with a response time of several hundred milliseconds. The proximity mode involves the application of stimulation using an acrylic probe, which demonstrates a detection range from 0.05 mm to 37.8 mm. Additionally, it has a rapid response time of approximately 100 ms, ensuring consistent signal variations throughout both the approach and withdrawal phases. The sensor fabrication method proposed in this project effectively minimizes expenses and accelerates the preparation cycle through precise control of laser processing parameters to shape the electrode-dielectric layer-electrode within a single substrate material. Based on their exceptional combined performance, our pressure and proximity sensors exhibit significant potential in practical applications such as motion monitoring and distance detection.
智能可穿戴设备因其固有的灵活性、便携性和实时监测优势而在各个领域得到广泛应用。其中，柔性传感器展现出卓越的柔韧性和延展性，使其成为可穿戴电子学研究的一个突出重点。然而，柔性可穿戴传感器的实现往往需要复杂且耗时的过程，导致成本高昂，这阻碍了整个领域的发展。在此，我们报告一种基于氧化激光诱导石墨烯（氧化LIG）作为被图案化LIG电极夹在中间的介电层的压力和接近度传感器，其特点是具有高速性和成本效益。研究发现，在低于0.1kHz的低频范围内，氧化LIG层的相对介电常数达到104数量级。这种双峰电容式传感器的压力模式能够检测1.34Pa至800Pa范围内的压力，响应时间为几百毫秒。接近度模式涉及使用丙烯酸探针施加刺激，其检测范围为0.05mm至37.8mm。此外，它具有约100ms的快速响应时间，确保在接近和撤离阶段信号变化一致。本项目提出的传感器制造方法通过精确控制激光加工参数，在单一基材内塑造电极 - 介电层 - 电极，有效降低了成本并加速了制备周期。基于其卓越的综合性能，我们的压力和接近度传感器在运动监测和距离检测等实际应用中展现出巨大潜力。
