Terekhov Pavel, Chang Shengyuan, Rahman Md Tarek, Shafi Sadman, Ahn Hyun-Ju, Zhao Linghan, Ni Xingjie
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802, USA.
Nanophotonics. 2024 May 21;13(17):3147-3154. doi: 10.1515/nanoph-2024-0150. eCollection 2024 Jul.
The metasurfaces have shown great potential for miniaturizing conventional optics while offering extended flexibility. Recently, there has been considerable interest in using algorithms to generate meta-atom shapes for these metasurfaces, as they offer vast design freedom and not biased by the human intuition. However, these complex designs significantly increase the difficulty of fabrication. To address this, we introduce a design process that rigorously enforces the fabricability of both the material-filled (fill) and empty (void) regions in a metasurface design. This process takes into account specific constraints regarding the minimum feature size for each region. Additionally, it corrects any violations of these constraints across the entire device, ensuring only minimal impact on performance. Our method provides a practical way to create metasurface designs that are easy to fabricate, even with complex shapes, hence improving the overall production yield of these advanced meta-optical components.
超表面在使传统光学器件小型化的同时展现出了巨大潜力，且具有更大的灵活性。近来，人们对使用算法生成这些超表面的超原子形状兴趣浓厚，因为它们提供了巨大的设计自由度，且不受人类直觉的限制。然而，这些复杂的设计显著增加了制造难度。为解决这一问题，我们引入了一种设计流程，该流程严格确保超表面设计中材料填充（填充）区域和空区域（空隙）的可制造性。此流程考虑了每个区域最小特征尺寸的特定约束。此外，它会纠正整个器件中对这些约束的任何违反情况，确保对性能的影响最小。我们的方法提供了一种切实可行的方式来创建易于制造的超表面设计，即使是复杂形状的设计，从而提高这些先进超光学元件的整体生产良率。
