Huang Lingyu, Xu Kang, Yuan Dandan, Hu Jin, Wang Xinwei, Xu Shaolin
Department of Mechanical and Energy Engineering, Southern University of Science and Technology, 1088 Xueyuan Avenue, Shenzhen, 518055, China.
Department of Mechanical Engineering, Iowa State University, Ames, IA, 50011, USA.
Nat Commun. 2022 Oct 3;13(1):5823. doi: 10.1038/s41467-022-33644-8.
Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm) revealing excellent infrared absorption (3-7 μm), which comprises 250,000 concentric rings and takes only 5 minutes to produce.
经过严格设计的亚微米结构阵列被广泛应用于用于光调制的超表面。一个明显的限制是缺乏易于获得的制造方法，无法高效地生产具有纳米级分辨率的大面积且可自由设计的结构阵列。我们开发了一种图案化脉冲激光光刻（PPLL）方法，在环境条件下，在带有衬底的大面积薄膜上创建具有亚波长特征分辨率且周期从小于1μm到超过15μm的结构阵列。通过准二元相位掩模产生具有图案化波前的分离超快激光脉冲，通过高速扫描快速创建周期性烧蚀/改性结构。波前的梯度强度边界和圆偏振在光传播过程中减弱了衍射和偏振相关的不对称效应，从而实现了高均匀性。在金属和无机光刻胶薄膜上获得了超表面的结构单元，如天线、悬链线和纳米光栅。我们展示了一个大面积超表面（10×10mm），其具有出色的红外吸收（3 - 7μm），它由250,000个同心环组成，制作仅需5分钟。
