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Ni-W层在Sn/Cu界面反应中的扩散阻挡性能

Diffusion Barrier Performance of Ni-W Layer at Sn/Cu Interfacial Reaction.

作者信息

Yao Jinye, Li Chenyu, Shang Min, Chen Xiangxu, Wang Yunpeng, Ma Haoran, Ma Haitao, Liu Xiaoying

机构信息

School of Materials Science and Engineering, Dalian University of Technology, Dalian 116000, China.

School of Microelectronics, Dalian University of Technology, Dalian 116024, China.

出版信息

Materials (Basel). 2024 Jul 25;17(15):3682. doi: 10.3390/ma17153682.

DOI:10.3390/ma17153682
PMID:39124349
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11313083/
Abstract

As the integration of chips in 3D integrated circuits (ICs) increases and the size of micro-bumps reduces, issues with the reliability of service due to electromigration and thermomigration are becoming more prevalent. In the practical application of solder joints, an increase in the grain size of intermetallic compounds (IMCs) has been observed during the reflow process. This phenomenon results in an increased thickness of the IMC layer, accompanied by a proportional increase in the volume of the IMC layer within the joint. The brittle nature of IMC renders it susceptible to excessive growth in small-sized joints, which has the potential to negatively impact the reliability of the welded joint. It is therefore of the utmost importance to regulate the formation and growth of IMCs. The following paper presents the electrodeposition of a Ni-W layer on a Cu substrate, forming a barrier layer. Subsequently, the barrier properties between the Sn/Cu reactive couples were subjected to a comprehensive and systematic investigation. The study indicates that the Ni-W layer has the capacity to impede the diffusion of Sn atoms into Cu. Furthermore, the Ni-W layer is a viable diffusion barrier at the Sn/Cu interface. The "bright layer" NiWSn can be observed in all Ni-W coatings during the soldering reflow process, and its growth was almost linear. The structure of the Ni-W layer is such that it reduces the barrier properties that would otherwise be inherent to it. This is due to the "bright layer" NiWSn that covers the original Ni-W barrier layer. At a temperature of 300 °C for a duration of 600 s, the Ni-W barrier layer loses its blocking function. Once the "bright layer" NiWSn has completely covered the original Ni-W barrier layer, the diffusion activation energy for Sn diffusion into the Cu substrate side will be significantly reduced, particularly in areas where the distortion energy is concentrated due to electroplating tension. Both the "bright layer" NiWSn and Sn will grow rapidly, with the formation of Cu-Sn intermetallic compounds (IMCs). At temperatures of 250 °C, the growth of NiSn-based IMCs is controlled by grain boundaries. Conversely, the growth of the NiWSn layer (consumption of Ni-W layer) is influenced by a combination of grain boundary diffusion and bulk diffusion. At temperatures of 275 °C and 300 °C, the growth of NiSn-based IMCs and the NiWSn layer (consumption of Ni-W layer) are both controlled by grain boundaries. The findings of this study can inform the theoretical design of solder joints with barrier layers as well as the selection of Ni-W diffusion barrier layers for use in different soldering processes. This can, in turn, enhance the reliability of microelectronic devices, offering significant theoretical and practical value.

摘要

随着三维集成电路(IC)中芯片集成度的提高以及微凸点尺寸的减小,由电迁移和热迁移导致的服务可靠性问题日益普遍。在焊点的实际应用中,回流过程中金属间化合物(IMC)的晶粒尺寸有所增大。这种现象导致IMC层厚度增加,同时焊点内IMC层的体积也相应增加。IMC的脆性使其在小型焊点中容易过度生长,这有可能对焊接接头的可靠性产生负面影响。因此,调控IMC的形成和生长至关重要。以下论文介绍了在铜基板上电沉积镍钨层以形成阻挡层的过程。随后,对锡/铜反应偶之间的阻挡性能进行了全面系统的研究。研究表明,镍钨层能够阻碍锡原子向铜中的扩散。此外,镍钨层在锡/铜界面处是一种可行的扩散阻挡层。在焊接回流过程中,所有镍钨涂层中均可观察到“光亮层”NiWSn,其生长几乎呈线性。镍钨层的结构导致其原本具有的阻挡性能降低。这是由于“光亮层”NiWSn覆盖了原始的镍钨阻挡层。在300℃下持续600秒时,镍钨阻挡层失去其阻挡功能。一旦“光亮层”NiWSn完全覆盖原始的镍钨阻挡层,锡向铜基板一侧扩散的激活能将显著降低,特别是在由于电镀张力导致畸变能集中的区域。“光亮层”NiWSn和锡都会快速生长,并形成铜 - 锡金属间化合物(IMC)。在250℃时,基于NiSn的IMC的生长受晶界控制。相反,NiWSn层的生长(镍钨层的消耗)受晶界扩散和体扩散的共同影响。在275℃和300℃时,基于NiSn的IMC和NiWSn层的生长(镍钨层 的消耗)均受晶界控制。本研究的结果可为带有阻挡层的焊点的理论设计以及不同焊接工艺中镍钨扩散阻挡层的选择提供参考。这反过来可以提高微电子器件的可靠性,具有重要的理论和实际价值。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/19dbf857ba4f/materials-17-03682-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/2d296dee02d1/materials-17-03682-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/5c268189f5f4/materials-17-03682-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/6657f344e7b2/materials-17-03682-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/e224c3fc30f7/materials-17-03682-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/70f652e49c2c/materials-17-03682-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/5363472fdd0f/materials-17-03682-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/03ff5bcac90c/materials-17-03682-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/161788804f8e/materials-17-03682-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/cf37948695b2/materials-17-03682-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/19dbf857ba4f/materials-17-03682-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/2d296dee02d1/materials-17-03682-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/5c268189f5f4/materials-17-03682-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/6657f344e7b2/materials-17-03682-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/e224c3fc30f7/materials-17-03682-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/70f652e49c2c/materials-17-03682-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/5363472fdd0f/materials-17-03682-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/03ff5bcac90c/materials-17-03682-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/161788804f8e/materials-17-03682-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/cf37948695b2/materials-17-03682-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d422/11313083/19dbf857ba4f/materials-17-03682-g010.jpg

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