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基于六方氮化硼的忆阻器表面残余气体吸附研究。

Research on Residual Gas Adsorption on Surface of Hexagonal Boron Nitride-Based Memristor.

作者信息

Ding Cheng, Chen Yue, Yang Jin, Lu Shibin, Dai Yuehua

机构信息

Anhui Province Key Laboratory of Simulation and Design for Electronic Information System (Hefei Normal University), Hefei 230601, PR China.

School of Integrated Circuits, Anhui University, Hefei 230601, PR China.

出版信息

ACS Omega. 2024 Jul 31;9(32):34597-34607. doi: 10.1021/acsomega.4c02990. eCollection 2024 Aug 13.

Abstract

As a promising nonvolatile memory device with two ends, the memristor has received extensive attention for its industrial manufacture. Density functional theory was used to analyze the adsorption properties of residual gas on hexagonal boron nitride (h-BN)-based memristor model surfaces with Stone-Wales-5577 grain boundary defects [h-BN(SW)]. First, by calculating the adsorption energy, geometric parameters, and charge transfer, we identified the most stable adsorption sites for hydrogen atoms (H-TB1) and H molecules (H-TN2). We observed a tendency toward chemisorption for hydrogen atoms and physical adsorption for H molecules at these sites. Furthermore, two coadsorption configurations were formed by introducing H molecules and hydrogen atoms into single adsorption configurations: namely H-TB1_H-TN1TN2 and H-TN2_H-TB1TN1TN3. In the case of hydrogen-based configuration, there is weak dissociation of the H molecule, which does not facilitate hydrogen atom adsorption. However, adjacent hydrogen atoms tend to form stable dimers, while excess hydrogen atoms have a tendency to weakly chemisorb in the case of H-based configuration. The pristine h-BN surface is more favorable for hydrogen atom migration compared to the h-BN(SW) surface due to its higher adsorption energy. On the h-BN(SW) surface, hydrogen atoms tend to migrate inward from the center of adjacent heptagonal boron nitride rings while coadsorption has a minimal impact on their vertical migration as well as that of H molecules. This work provides theoretical insights into the H/H trace gas interaction during h-BN wafer-level fabrication for memristor devices.

摘要

作为一种有前景的两端非易失性存储器件,忆阻器因其工业制造而受到广泛关注。采用密度泛函理论分析了残余气体在具有斯通-威尔士-5577晶界缺陷的六方氮化硼(h-BN)基忆阻器模型表面[h-BN(SW)]上的吸附特性。首先,通过计算吸附能、几何参数和电荷转移,我们确定了氢原子(H-TB1)和H分子(H-TN2)最稳定的吸附位点。我们观察到在这些位点上氢原子有化学吸附倾向,而H分子有物理吸附倾向。此外,通过将H分子和氢原子引入单吸附构型形成了两种共吸附构型:即H-TB1_H-TN1TN2和H-TN2_H-TB1TN1TN3。在氢基构型的情况下,H分子存在弱解离,这不利于氢原子吸附。然而,相邻氢原子倾向于形成稳定的二聚体,而在氢基构型情况下,过量氢原子有弱化学吸附倾向。由于其较高的吸附能,原始h-BN表面比h-BN(SW)表面更有利于氢原子迁移。在h-BN(SW)表面,氢原子倾向于从相邻七边形氮化硼环的中心向内迁移,而共吸附对其垂直迁移以及H分子的垂直迁移影响最小。这项工作为忆阻器器件h-BN晶圆级制造过程中H/H痕量气体相互作用提供了理论见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/aebd/11325510/2fabf09b89a2/ao4c02990_0001.jpg

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