Hsu Tzu-Hsuan, Lee Zhi-Qiang, Wu Guan-Lin, Yeh Chun-Chen, Tsai Chia-Hsien, Li Ming-Huang
IEEE Trans Ultrason Ferroelectr Freq Control. 2024 Oct;71(10):1324-1334. doi: 10.1109/TUFFC.2024.3448217. Epub 2024 Oct 10.
The need for wideband radio frequency front ends (RFFEs) with next-generation wireless protocols highlights the importance of electromechanical coupling [Formula: see text]. The hetero acoustic layered (HAL) surface acoustic wave (SAW) resonator with aluminum (Al) electrodes has shown superior performance compared to conventional SAW devices. Despite gold (Au) having excellent conductivity and stable properties, its high acoustic absorption and low phase velocity have made it less favorable for electrodes. This work demonstrates that high-performance shear horizontal (SH)-SAW resonators can be fabricated on the lithium niobate-on-insulator (LNOI) platform using a setup specifically designed for an Au electrodes. Experimental validation shows that the device achieves a high quality factor (Q) over 870, excellent [Formula: see text] up to 40%, and operates around 765 MHz. Unwanted transverse spurious modes are suppressed through adequate electrode design, and the temperature stability of LNOI SH-SAW with Au electrodes is discussed. This study highlights gold's potential as an electrode material for high [Formula: see text], clean spectrum, and wideband applications.
对具有下一代无线协议的宽带射频前端（RFFE）的需求凸显了机电耦合[公式：见原文]的重要性。具有铝（Al）电极的异质声学层（HAL）表面声波（SAW）谐振器与传统SAW器件相比表现出卓越性能。尽管金（Au）具有优异的导电性和稳定的特性，但其高声吸收和低相速度使其不太适合用作电极。这项工作表明，使用专门为金电极设计的装置，可以在绝缘体上铌酸锂（LNOI）平台上制造高性能的水平剪切（SH）-SAW谐振器。实验验证表明，该器件实现了超过870的高品质因数（Q），高达40%的优异[公式：见原文]，并在765 MHz左右工作。通过适当的电极设计抑制了不需要的横向杂散模式，并讨论了带有金电极的LNOI SH-SAW的温度稳定性。这项研究突出了金作为用于高[公式：见原文]、纯净频谱和宽带应用的电极材料的潜力。
