Chen Lei, Liang Huikang, Liu Peng, Shu Zhiwen, Wang Quan, Dong Xiaoqian, Xie Jianfei, Feng Bo, Duan Huigao
College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, P. R. China.
Greater Bay Area Institute for Innovation, Hunan University, Guangzhou 511300, P. R. China.
ACS Nano. 2024 Sep 3;18(35):23968-23978. doi: 10.1021/acsnano.4c00564. Epub 2024 Aug 23.
Transfer printing is a technology widely used in the production of flexible electronics and vertically stacked devices, which involves the transfer of predefined electronic components from a rigid donor substrate to a receiver substrate with a stamp, potentially avoiding the limitations associated with lithographic processes. However, the stamps typically used in transfer printing have several limitations related to unwanted organic solvents, substantial loading, film damage, and inadequate adhesion switching ratios. This study introduces a thermally responsive phase-change stamp for efficient and damage-free transfer printing inspired by the adhesion properties observed during water freezing and ice melting. The stamp employs phase-change composites and simple fabrication protocols, providing robust initial adhesion strength and switchability. The underlying mechanism of switchable adhesion is investigated through experimental and numerical studies. Notably, the stamp eliminates the need for extra preload by spontaneously interlocking with the ink through in situ melting and crystallization. This minimizes ink damage and wrinkle formation during pickup while maintaining strong initial adhesion. During printing, the stamp exhibits a sufficiently weak adhesion state for reliable and consistent release, enabling multiscale, conformal, and damage-free transfer printing, ranging from nano- to wafer-scale. The fabrication of nanoscale short-channel transistors, epidermal electrodes, and human-machine interfaces highlights the potential of this technique in various emerging applications of nanoelectronics, nano optoelectronics, and soft bioelectronics.
转移印刷是一种广泛应用于柔性电子产品和垂直堆叠器件生产的技术,它涉及使用印章将预定义的电子元件从刚性供体基板转移到受体基板上,这有可能避免光刻工艺的局限性。然而,转移印刷中通常使用的印章存在一些局限性,例如存在有害有机溶剂、负载量大、薄膜损坏以及粘附切换率不足等问题。本研究受水冻结和冰融化过程中观察到的粘附特性启发,引入了一种用于高效且无损伤转移印刷的热响应相变印章。该印章采用相变复合材料和简单的制造工艺,具有强大的初始粘附强度和可切换性。通过实验和数值研究对可切换粘附的潜在机制进行了研究。值得注意的是,该印章通过原位熔化和结晶与墨水自发联锁,无需额外的预加载。这在拾取过程中最大限度地减少了墨水损伤和皱纹形成,同时保持了强大的初始粘附力。在印刷过程中,印章表现出足够弱的粘附状态,以便可靠且一致地释放,从而实现从纳米级到晶圆级的多尺度、保形且无损伤的转移印刷。纳米级短沟道晶体管、表皮电极和人机界面的制造突出了该技术在纳米电子学、纳米光电子学和软生物电子学等各种新兴应用中的潜力。