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用于超薄薄膜和三维物体无损转移印刷的精确诱导局部熔化液态金属印章

Precision-induced localized molten liquid metal stamps for damage-free transfer printing of ultrathin membranes and 3D objects.

作者信息

Shi Chuanqian, Jiang Jing, Li Chenglong, Chen Chenhong, Jian Wei, Song Jizhou

机构信息

Center for Mechanics Plus under Extreme Environments, School of Mechanical Engineering & Mechanics, Ningbo University, Ningbo, China.

Key Laboratory of Impact and Safety Engineering, Ministry of Education, Ningbo University, Ningbo, China.

出版信息

Nat Commun. 2024 Oct 13;15(1):8839. doi: 10.1038/s41467-024-53184-7.

Abstract

Transfer printing, a crucial technique for heterogeneous integration, has gained attention for enabling unconventional layouts and high-performance electronic systems. Elastomer stamps are typically used for transfer printing, where localized heating for elastomer stamp can effectively control the transfer process. A key challenge is the potential damage to ultrathin membranes from the contact force of elastic stamps, especially with fragile inorganic nanomembranes. Herein, we present a precision-induced localized molten technique that employs either laser-induced transient heating or hotplate-induced directional heating to precisely melt solid gallium (Ga). By leveraging the fluidity of localized molten Ga, which provides gentle contact force and exceptional conformal adaptability, this technique avoids damage to fragile thin films and improves operational reliability compared to fully liquefied Ga stamps. Furthermore, the phase transition of Ga provides a reversible adhesion with high adhesion switchability. Once solidified, the Ga stamp hardens and securely adheres to the micro/nano-membrane during the pick-up process. The solidified stamp also exhibits the capability to maneuver arbitrarily shaped objects by generating a substantial grip force through the interlocking effects. Such a robust, damage-free, simply operable protocol illustrates its promising capabilities in transfer printing diverse ultrathin membranes and objects on complex surfaces for developing high-performance unconventional electronics.

摘要

转移印刷作为异质集成的一项关键技术,因其能够实现非常规布局和高性能电子系统而受到关注。弹性体印章通常用于转移印刷,其中对弹性体印章进行局部加热可以有效地控制转移过程。一个关键挑战是弹性印章的接触力可能会对超薄薄膜造成损害,尤其是对于易碎的无机纳米薄膜。在此,我们提出一种精确诱导局部熔化技术,该技术采用激光诱导瞬态加热或热板诱导定向加热来精确熔化固态镓(Ga)。通过利用局部熔化的镓的流动性,其提供了柔和的接触力和出色的共形适应性,与完全液化的镓印章相比,该技术避免了对易碎薄膜的损坏并提高了操作可靠性。此外,镓的相变提供了具有高粘附切换性的可逆粘附。一旦凝固,镓印章变硬并在拾取过程中牢固地粘附在微/纳米膜上。凝固的印章还具有通过互锁效应产生巨大抓力来操纵任意形状物体的能力。这样一种强大、无损伤、操作简单的方案展示了其在转移印刷各种超薄薄膜和复杂表面上的物体以开发高性能非常规电子产品方面的广阔前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fb5b/11471857/53e268c2b768/41467_2024_53184_Fig1_HTML.jpg

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