Li Aowen, Li Ang, Zhou Wu
School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, China.
School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, China.
Micron. 2024 Nov;186:103706. doi: 10.1016/j.micron.2024.103706. Epub 2024 Aug 25.
The properties of materials are strongly correlated with their atomic scale structures. Achieving a comprehensive understanding of the atomic-scale structure-property relationship requires advancements of imaging and spectroscopy techniques. Aberration-corrected scanning transmission electron microscopy (STEM) has seen rapid development over the past decades and is now routinely employed for atomic-scale characterization. However, quantitative STEM imaging and spectroscopy analysis at the single-atom level is challenging due to the extremely weak signals generated from individual atom, thus imposing stringent requirements for analysis sensitivity. This review discusses the development and application of low-voltage STEM techniques with single-atom sensitivity, primarily based on recent research presented on an invited talk at the 5th 2D23 SALVE Symposium, including annular dark-field (ADF) imaging, functional imaging and electron energy-loss spectroscopy (EELS) analysis. Carbon-based nanomaterials were chosen as model systems for demonstrating the capabilities of single-atom STEM imaging and EELS analysis, due to their structural stability under low accelerating voltages and their rich physical and chemical properties. Moreover, this review summarizes recent advancements and applications of low-voltage single-atom STEM imaging and spectroscopy in the study of functional materials and discusses prospects for future developments.
材料的性质与其原子尺度结构密切相关。要全面理解原子尺度的结构-性质关系,需要成像和光谱技术的进步。在过去几十年中,像差校正扫描透射电子显微镜(STEM)发展迅速,如今已常规用于原子尺度表征。然而,由于单个原子产生的信号极其微弱,在单原子水平上进行定量STEM成像和光谱分析具有挑战性,因此对分析灵敏度提出了严格要求。本综述主要基于在第5届2D23 SALVE研讨会上受邀演讲中展示的近期研究,讨论了具有单原子灵敏度的低电压STEM技术的发展和应用,包括环形暗场(ADF)成像、功能成像和电子能量损失谱(EELS)分析。由于碳基纳米材料在低加速电压下的结构稳定性及其丰富的物理和化学性质,因此被选为展示单原子STEM成像和EELS分析能力的模型系统。此外,本综述总结了低电压单原子STEM成像和光谱在功能材料研究中的最新进展和应用,并讨论了未来发展前景。