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具有十字中心块结构和可靠电极的MEMS压阻式高g加速度计的研制

Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode.

作者信息

Li Cun, Zhang Ran, Hao Le, Zhao Yulong

机构信息

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

出版信息

Sensors (Basel). 2024 Aug 27;24(17):5540. doi: 10.3390/s24175540.

DOI:10.3390/s24175540
PMID:39275451
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11398022/
Abstract

A MEMS piezoresistive sensor for measuring accelerations greater than 100,000 g (about 10 m/s) is described in this work. To enhance the performance of the sensor, specifically widening its measurement range and natural frequency, a cross-beam construction with a center block was devised, and a Wheatstone bridge was formed by placing four piezoresistors at the ends of the fixed beams to convert acceleration into electricity. The location of the varistor was determined using the finite element approach, which yielded the optimal sensitivity. Additionally, a reliable Pt-Ti-Pt-Au electrode was designed to solve the issue of the electrode failing under high impact and enhancing the stability of the ohmic contact. The accelerometer was fabricated using MEMS technology, and the experiment with a Hopkinson pressure bar and hammering was conducted, and the bias stability was measured. It had a sensitivity of 1.06 μV/g with good linearity. The simulated natural frequency was 633 kHz The test result revealed that the accelerometer can successfully measure an acceleration of 100,000 g.

摘要

本文介绍了一种用于测量大于100,000 g（约10 m/s）加速度的MEMS压阻式传感器。为提高传感器性能，特别是拓宽其测量范围和固有频率，设计了一种带有中心块的交叉梁结构，并通过在固定梁端部放置四个压阻器形成惠斯通电桥，将加速度转换为电信号。使用有限元方法确定了压敏电阻的位置，从而获得了最佳灵敏度。此外，设计了一种可靠的Pt-Ti-Pt-Au电极，以解决电极在高冲击下失效的问题，并增强欧姆接触的稳定性。该加速度计采用MEMS技术制造，并使用霍普金森压杆和锤击进行了实验，测量了偏置稳定性。其灵敏度为1.06 μV/g，线性度良好。模拟固有频率为633 kHz。测试结果表明，该加速度计能够成功测量100,000 g的加速度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/2f7c3e8b176f/sensors-24-05540-g018.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/2f7c3e8b176f/sensors-24-05540-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/ad2fb70cf5f1/sensors-24-05540-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/fb4fc3c43e41/sensors-24-05540-g002.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/2795d9288b77/sensors-24-05540-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/1d9bae3d2ad4/sensors-24-05540-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/3758cbda7d8f/sensors-24-05540-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/8b7867a5643c/sensors-24-05540-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/ed417592d306/sensors-24-05540-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/44a04267adbd/sensors-24-05540-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/ad0b23a4b5b5/sensors-24-05540-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/1f43fc4c0dd0/sensors-24-05540-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/d44fedd3eaef/sensors-24-05540-g015.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/8916986faf7a/sensors-24-05540-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8dfb/11398022/2f7c3e8b176f/sensors-24-05540-g018.jpg

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本文引用的文献

1
Novel high-performance piezoresistive shock accelerometer for ultra-high-g measurement utilizing self-support sensing beams.基于自支撑传感梁的新型高性能压阻式冲击加速度计用于超高g值测量。
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2
Design and Application of a High-G Piezoresistive Acceleration Sensor for High-Impact Application.用于高冲击应用的高g值压阻式加速度传感器的设计与应用
Micromachines (Basel). 2018 May 28;9(6):266. doi: 10.3390/mi9060266.
3
Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS).
用于轮胎压力测量系统（TPMS）的微压力传感器的制造和结构设计。
Sensors (Basel). 2009;9(3):1382-93. doi: 10.3390/s90301382. Epub 2009 Feb 27.